Marius Haiducu
at Simon Fraser Univ
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 7 February 2012 Paper
Marius Haiducu, Dan Sameoto, Ian Foulds, Robert Johnstone, Ash Parameswaran
Proceedings Volume 8248, 82480G (2012) https://doi.org/10.1117/12.908690
KEYWORDS: Polymethylmethacrylate, Etching, Lamps, Deep ultraviolet, Microfluidics, Light, Aluminum, Microfabrication, Optical lithography, Microelectromechanical systems

Proceedings Article | 18 February 2010 Paper
Aminreza Ahari Kaleibar, Mona Rahbar, Marius Haiducu, Ash Parameswaran
Proceedings Volume 7593, 75930E (2010) https://doi.org/10.1117/12.841345
KEYWORDS: Microfluidics, Polymethylmethacrylate, Printing, Optical lithography, Image processing, Computer aided design, Deep ultraviolet, Ultraviolet radiation, Lamps, Etching

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