Mr. Mark A. Beals Profile

Mark A. Beals

Associate Director at Massachusetts Institute of Technology

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Author

Publications (4)

Proceedings Article | 13 February 2008 Paper

Optical modulation techniques for analog signal processing and CMOS compatible electro-optic modulation

Douglas Gill, Young-Kai Chen, Jurgen Mitchel, Anthony Kopa, Jifeng Liu, Mahmoud Rasras, Sanjay Patel, Lionel Kimerling, Mark Beals, Daniel Carothers, James Beattie, Alice White, Robert Kamocsai, Andrew Pomerene, Alyssa Apsel, Kun-Yii Tu

Proceedings Volume 6898, 689803 (2008) https://doi.org/10.1117/12.777113

KEYWORDS: Modulators, Modulation, Resonators, Silicon, Waveguides, Analog electronics, Electro optics, Signal processing, Electrooptic modulators, Polarization

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Proceedings Article | 13 February 2008 Paper

Process flow innovations for photonic device integration in CMOS

Mark Beals, A. Apsel, L. Kimerling, J. Beattie, Y. Chen, J. Michel, A. Pomerene, K. Y. Tu, S. Patel, A. Kopa, D. Ahn, C. Y. Hong, D. Sparacin, A. White, J. Liu, M. Rasras, D. Carothers, D. Gill, R. Sun

Proceedings Volume 6898, 689804 (2008) https://doi.org/10.1117/12.774576

KEYWORDS: Silicon, Waveguides, Germanium, Oxides, Modulators, Photonic devices, Sensors, Silicon films, Plasma enhanced chemical vapor deposition, Signal processing

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Proceedings Article | 9 February 2007 Paper

Advances in fully CMOS integrated photonic devices

L. Kimerling, W. Giziewicz, M. Beals, R. Sun, A. Kopa, K. Tu, A. Apsel, D. Sparacin, A. Pomerene, C. Hong, A. White, M. Grove, Jurgen Michel, D. Ahn, Y. Chen, J. Liu, S. Patel, D. Carothers, M. Rasras, D. Gill

Proceedings Volume 6477, 64770P (2007) https://doi.org/10.1117/12.706586

KEYWORDS: Waveguides, Sensors, Silicon, Modulators, Optical filters, Resonators, Photodetectors, Microwave radiation, Signal processing, Semiconducting wafers

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Proceedings Article | 1 March 2006 Paper

Electronic-photonic integrated circuits on the CMOS platform

D. Pan, Y.-K. Chen, A. Apsel, K.-Y. Tu, M. Rasras, D. Sparacin, D. Carothers, D. Ahn, M. Grove, M. Lipson, L. Kimerling, C.-Y. Hong, M. Beals, A. Pomerene, D. Gill, A. White, S. Patel, J. Liu, T. Conway, C. Wong, J. Michel

Proceedings Volume 6125, 612502 (2006) https://doi.org/10.1117/12.654455

KEYWORDS: Waveguides, Silicon, Sensors, Modulators, Signal processing, Photodetectors, Optical filters, Signal attenuation, Germanium, Integrated circuits

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