Dr. Mark Cheng Profile

Dr. Mark Cheng

Graduate Student

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Publications (2)

Proceedings Article | 1 October 1999 Paper

Ultralow-stress silicon-rich nitride films for microstructure fabrication

MingCheng Cheng, Wei-Gei Ho, Chin Chang, Wen Huang, Ruey-Shing Huang

Proceedings Volume 3892, (1999) https://doi.org/10.1117/12.364478

KEYWORDS: Silicon, Low pressure chemical vapor deposition, Deposition processes, Refractive index, Etching, Silicon films, Semiconducting wafers, Anisotropic etching, Microelectromechanical systems, Nitrogen

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Proceedings Article | 14 November 1997 Paper

Microelectrode array: a new method for the design of electrostatic microactuators and capacitive microsensors

Chienliu Chang, Peizen Chang, Ruey-Shing Huang, Chin Chang, MingCheng Cheng

Proceedings Volume 3242, (1997) https://doi.org/10.1117/12.293542

KEYWORDS: Electrodes, Mirrors, Deformable mirrors, Actuators, Silicon, Sensors, Finite element methods, Mechanics, Semiconducting wafers, Magnetism

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