Dr. Mark Cheng
Graduate Student
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 1 October 1999 Paper
Proc. SPIE. 3892, Device and Process Technologies for MEMS and Microelectronics
KEYWORDS: Silicon, Low pressure chemical vapor deposition, Deposition processes, Refractive index, Etching, Silicon films, Semiconducting wafers, Anisotropic etching, Microelectromechanical systems, Nitrogen

Proceedings Article | 14 November 1997 Paper
Proc. SPIE. 3242, Smart Electronics and MEMS
KEYWORDS: Electrodes, Mirrors, Deformable mirrors, Actuators, Silicon, Sensors, Finite element methods, Mechanics, Semiconducting wafers, Magnetism

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