Mr. Mark E. Heaton Profile

Mark E. Heaton

at Imperial College London

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Author

Publications (3)

Proceedings Article | 8 June 2005 Paper

Microsystems and nanotechnology: conceptual issues in education and society

M. Heaton, Norman McMillan

Proceedings Volume 5827, (2005) https://doi.org/10.1117/12.606092

KEYWORDS: Nanotechnology, Information technology, Microsystems, Microelectromechanical systems, Analytical research, Biotechnology, Photonics, Manufacturing, Sensors, Physics

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Proceedings Article | 2 June 2005 Paper

Laser machining for smooth continuous 3-D contouring for micro airflow blades

Mark Heaton

Proceedings Volume 5824, (2005) https://doi.org/10.1117/12.605250

KEYWORDS: Laser ablation, Excimer lasers, Photomasks, Micromachining, Microscopes, Profiling, Microelectromechanical systems, Thermal effects, Laser marking, Pulsed laser operation

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Proceedings Article | 18 November 2003 Paper

Laser profiling of 3D microturbine blades

Andrew Holmes, Mark Heaton, Guodong Hong, Keith Pullen, Phil Rumsby

Proceedings Volume 5063, (2003) https://doi.org/10.1117/12.540733

KEYWORDS: Micromachining, Excimer lasers, Laser ablation, Photomasks, Scanning electron microscopy, Ultraviolet radiation, Profiling, Silicon, Polymers, Lithography

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Conference Committee Involvement (1)

Surface Engineering and Nanotechnology

6 April 2005 | Dublin, Ireland

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