Martin Bohn
at Synopsys GmbH
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 4 April 2019 Paper
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Lithography, Computer simulations, 3D modeling, Photomasks, Extreme ultraviolet, Computational lithography, Optical proximity correction, Photoresist processing, Performance modeling, Resolution enhancement technologies

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