Dr. Martin A. Hunt Profile

Dr. Martin A. Hunt

Director of Applications Engineering at Coherent Logix Inc

SPIE Involvement:

Author

Proceedings Article | 27 May 2011 Paper

Parallel design patterns for a low-power, software-defined compressed video encoder

Michael Bruns, Martin Hunt, Durga Prasad, Nageswara Gunupudi, Sekar Sonachalam

Proc. SPIE. 8063, Mobile Multimedia/Image Processing, Security, and Applications 2011

KEYWORDS: Clocks, Video acceleration, Data modeling, Video, Parallel processing, Computer programming, Video compression, Quantization, Parallel computing, Computer architecture

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Proceedings Article | 5 May 2011 Paper

Low-power, real-time digital video stabilization using the HyperX parallel processor

Martin Hunt, Lin Tong, Keith Bindloss, Shang Zhong, Steve Lim, Benjamin Schmid, J. Tidwell, Paul Willson

Proc. SPIE. 8050, Signal Processing, Sensor Fusion, and Target Recognition XX

KEYWORDS: Cameras, Sensors, Video, Computer programming, Video surveillance, Image filtering, Corner detection, Video processing, Parallel computing, Motion measurement

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Proceedings Article | 15 July 2003 Paper

Semiconductor wafer defect detection using digital holography

Mark Schulze, Martin Hunt, Edgar Voelkl, Joel Hickson, William Usry, Randall Smith, Robert Bryant, C. Thomas

Proc. SPIE. 5041, Process and Materials Characterization and Diagnostics in IC Manufacturing

KEYWORDS: Image visualization, Holograms, Digital holography, Defect detection, Visualization, Inspection, Wavefronts, Scanning electron microscopy, Digital imaging, Semiconducting wafers

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Proceedings Article | 22 May 2003 Paper

Automated image registration in semiconductor industry: a case study in the direct-to-digital holography inspection system

X. Dai, Martin Hunt

Proc. SPIE. 5011, Machine Vision Applications in Industrial Inspection XI

KEYWORDS: Semiconductors, Holograms, Defect detection, Inspection, Fourier transforms, Wavefronts, Image registration, Wafer inspection, Optical alignment, Semiconducting wafers

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Proceedings Article | 12 July 2002 Paper

Direct to digital holography for semiconductor wafer defect detection and review

C. Thomas, Tracy Bahm, Larry Baylor, Philip Bingham, Steven Burns, Matt Chidley, Long Dai, Robert Delahanty, Christopher Doti, Ayman El-Khashab, Robert Fisher, Judd Gilbert, James Goddard, Gregory Hanson, Joel Hickson, Martin Hunt, Kathy Hylton, George John, Michael Jones, Ken Macdonald, Michael Mayo, Ian McMackin, Dave Patek, John Price, David Rasmussen, Louis Schaefer, Thomas Scheidt, Mark Schulze, Philip Schumaker, Bichuan Shen, Randall Smith, Allen Su, Kenneth Tobin, William Usry, Edgar Voelkl, Karsten Weber, Paul Jones, Robert Owen

Proc. SPIE. 4692, Design, Process Integration, and Characterization for Microelectronics

KEYWORDS: Beam splitters, Holograms, Holography, Digital holography, Deep ultraviolet, Spatial frequencies, Cameras, Fourier transforms, Digital video recorders, Semiconducting wafers

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Proceedings Article | 2 June 2000 Paper

Paradigm for selecting the optimum classifier in semiconductor automatic defect classification applications

Martin Hunt, James Goddard, James Mullens, Regina Ferrell, Bobby Whitus, Ariel Ben-Porath

Proc. SPIE. 3998, Metrology, Inspection, and Process Control for Microlithography XIV

KEYWORDS: Semiconductors, Defect detection, Manufacturing, Inspection, Electron microscopes, Scanning electron microscopy, Neural networks, Very large scale integration, Semiconducting wafers, Classification systems

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The automatic classification of defects found on semiconductor wafers using a scanning electron microscope (SEM) is a complex task that involves many steps. The process includes re- detecting the defect, measuring attributes of the defect, and automatically assigning a classification. In many cases, especially during product ramp-up, and when multiple products are manufactured in the same line, there are few training examples for an automatic defect classification (ADC) system. This condition presents a problem for traditional supervised parametric and nonparametric learning techniques. In this paper we investigate the attributes of several approaches to ADC and compare their performance under a variety of available training data scenarios. We have selected to characterize the attributes and performance of a traditional K-nearest neighbor classifier, probabilistic neural network (PNN), and rule-based classifier in the context of SEM ADC. The PNN classifier is a nonparametric supervised classifier that is built around a radial basis function (RBF) neural network architecture. A basic summary of the PNN will be presented along with the generic strengths and weakness described in the literature and observed with actual semiconductor defect data. The PNN classifier is able to manage conditions such as non-convex class distributions and single class multiple clusters in feature space. A rule-based classifier producing built-in core classes provided by the Applied Materials SEMVision tool will be characterized in the context of both few examples and no examples. An extensive set of fab generated data is used to characterize the performance of these ADC approaches. Typical data sets contain from 30 to greater than 200. The number of classes in the data set range from 4 to more than 12. The conclusions reached from this analysis indicate that the strengths of each method are evident under specific conditions that are related to different stages within the VLSI yield curve, and to the number of different products in the line.

Proceedings Article | 21 March 2000 Paper

Accommodating multiple illumination sources in an imaging colorimetry environment

Kenneth Tobin, James Goddard, Martin Hunt, Kathy Hylton, Thomas Karnowski, Marc Simpson, Roger Richards, Dale Treece

Proc. SPIE. 3966, Machine Vision Applications in Industrial Inspection VIII

KEYWORDS: Imaging systems, Metals, Image segmentation, Image processing, Spectroscopy, Manufacturing, Inspection, Colorimetry, Color difference, Spectrophotometry

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Proceedings Article | 26 August 1999 Paper

Facet model and mathematical morphology for surface characterization

Besma Abidi, Hamed Sari-Sarraf, James Goddard, Martin Hunt

Proc. SPIE. 3837, Intelligent Robots and Computer Vision XVIII: Algorithms, Techniques, and Active Vision

KEYWORDS: Mathematical modeling, Image processing algorithms and systems, Detection and tracking algorithms, Image segmentation, Image processing, CCD cameras, Image filtering, Image enhancement, Algorithm development, Mathematical morphology

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Proceedings Article | 8 March 1999 Paper

Depth measurement of moving slurry at the wet end of a paper machine

James Goddard, Hamed Sari-Sarraf, John Turner, Martin Hunt, Besma Abidi

Proc. SPIE. 3652, Machine Vision Applications in Industrial Inspection VII

KEYWORDS: Imaging systems, Cameras, Sensors, Image processing, Computing systems, High speed cameras, CMOS cameras, Process control, Light sources and illumination, Binary data

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Proceedings Article | 8 March 1999 Paper

Imaging tristimulus colorimeter for the evaluation of color in printed textiles

Martin Hunt, James Goddard, Kathy Hylton, Thomas Karnowski, Roger Richards, Marc Simpson, Kenneth Tobin, Dale Treece

Proc. SPIE. 3652, Machine Vision Applications in Industrial Inspection VII

KEYWORDS: Image processing algorithms and systems, Optical filters, Imaging systems, Cameras, Image segmentation, Image processing, Reflectivity, CCD cameras, Spectrophotometry, Prototyping

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Proceedings Article | 3 April 1997 Paper

Circumference imaging for optical-based identification of cylindrical and conical objects

Martin Hunt, David Sitter, Regina Ferrell, J. Eric Breeding

Proc. SPIE. 3028, Real-Time Imaging II

KEYWORDS: Imaging systems, Cameras, Sensors, Image segmentation, Image processing, Lamps, Image acquisition, Distortion, Image sensors, Line scan image sensors

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Proceedings Article | 21 February 1996 Paper

Part identification using robust feature extraction and pattern classification

Martin Hunt, J. Steve Hicks, Shaun Gleason

Proc. SPIE. 2665, Machine Vision Applications in Industrial Inspection IV

KEYWORDS: Image segmentation, Image processing, Computing systems, Image acquisition, Hough transforms, Feature extraction, Image enhancement, Image classification, Artillery, Mahalanobis distance

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SPIE Journal Paper | 1 April 1991

Moment invariants for automated inspection of printed material

Marc Simpson, Richard Schmoyer, Martin Hunt

OE Vol. 30 Issue 04

KEYWORDS: Inspection, Visualization, Mahalanobis distance, Halftones, Image processing, Pattern recognition, Image segmentation, Reflectivity, Printing, Digital imaging

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Proceedings Article | 1 March 1991 Paper

Subpixel measurement of image features based on paraboloid surface fit

Shaun Gleason, Martin Hunt, William Jatko

Proc. SPIE. 1386, Machine Vision Systems Integration in Industry

KEYWORDS: Data modeling, Visualization, Image processing, Inspection, 3D modeling, Image registration, Distance measurement, Machine vision, Algorithm development, System integration

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Proceedings Article | 1 September 1990 Paper

Nonlinear filter derived from topological image features

William Jatko, Martin Hunt, Kenneth Tobin

Proc. SPIE. 1295, Real-Time Image Processing II

KEYWORDS: Statistical analysis, Image processing, Error analysis, Inspection, Laser engraving, Image registration, Printing, Image filtering, Algorithm development, Nonlinear filtering

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