EUV lithography systems are now fully deployed in the high-volume manufacturing of leading edge semiconductor devices. In this paper, we review the performance of ASML’s current generation light sources in the field and preview the next step in EUV source performance for the NXE:3800E system. The NXE:3800E system marks a substantial step forward in scanner productivity, delivering a remarkable increase of (+60 WPH) in throughput, made possible by an increase in EUV source power (to >500W). This significant increase in power was achieved through improvements in the droplet generator, higher power CO2 drive laser, improved collector design, and enhancements in our plasma controls required for higher plasma power. Details of these developments and their impact on system design and performance will be discussed, along with recent high-power performance demonstrations of the overall integrated EUV light source system.
In biological samples the resonant CARS signal of less abundant constituents can be overwhelmed by the nonresonant
background, preventing detection of those molecules. We demonstrate a method to obtain the phase of
the oscillators in the focal volume that allows discrimination of those hidden molecules. The phase is measured
with respect to the local excitation fields using a cascaded
phase-preserving chain. It is measured point-bypoint
and takes into account refractive index changes in the sample, phase curvature over the field-of-view and
interferometric instabilities. The detection of the phase of the vibrational motion can be regarded as a vibrational
extension of the linear (refractive index) phase contrast microscopy introduced by Zernike around 1933.
In this article we show that heterodyne CARS, based on a controlled and stable phase-preserving chain, can be
used to measure amplitude and phase information of molecular vibration modes. The technique is validated by
a comparison of the imaginary part of the heterodyne CARS spectrum to the spontaneous Raman spectrum of
polyethylene. The detection of the phase allows for rejection of the non-resonant background from the data. The
resulting improvement of the signal to noise ratio is shown by measurements on a sample containing lipid.
We demonstrate heterodyne detection of CARS signals using a cascaded phase-preserving chain to generate the CARS input wavelengths and a coherent local oscillator. The heterodyne amplification by the local oscillator reveals a window for shot noise limited detection before the signal-to-noise is limited by amplitude fluctuations. We demonstrate an improvement in sensitivity by more than 3 orders of magnitude for detection using a photodiode. This will enable CARS microscopy to reveal concentrations below the current mMolar range.
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