Mr. Martin Klos Profile

Martin Klos

at Bruker BNSM RMR

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 13 October 2020 Poster + Presentation + Paper

Maria Cadena, Marino Romanello, Daniel Yi, Tod Robinson, David Brinkley, Marty Klos

Proceedings Volume 11518, 1151811 (2020) https://doi.org/10.1117/12.2573094

KEYWORDS: Chemistry, Molecular machines, Extreme ultraviolet

Proceedings Article | 13 October 2020 Presentation + Paper

Maria Cadena, Tod Robinson, Marty Klos

Proceedings Volume 11518, 115180C (2020) https://doi.org/10.1117/12.2573093

KEYWORDS: Nanotechnology, Photomasks, Edge detection, Edge roughness

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Keywords/Phrases