Dr. Marvin Kilgo Profile

Dr. Marvin Kilgo

Vice President of Engineering

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Publications (2)

Proceedings Article | 30 August 1999 Paper

Economic fabrication of microscale features in thick resists using scanning projection lithography

Marvin Kilgo, Charles Williams, Dan Constantinide

Proceedings Volume 3874, (1999) https://doi.org/10.1117/12.361234

KEYWORDS: Projection lithography, Manufacturing, Microelectromechanical systems, Microfluidics, Photomasks, Photoresist processing, Photoresist materials, Lithography, Microfabrication, Photomicroscopy

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Proceedings Article | 19 August 1999 Paper

Generation of large-area microscale manifolds using excimer laser ablation

Simon Zhou, Marvin Kilgo, Charles Williams

Proceedings Volume 3877, (1999) https://doi.org/10.1117/12.359342

KEYWORDS: Laser ablation, Microfluidics, Manufacturing, Excimer lasers, Excimers, Polymers, Photomicroscopy, Sensors, Multilayers, Materials processing

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