Prof. Mary Ann J. Hockey
Applications Engineering Manager at Brewer Science Inc
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 3 June 2019 Presentation + Paper
Proc. SPIE. 10958, Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019
KEYWORDS: Etching, Extreme ultraviolet lithography, System on a chip, Line width roughness, Lithography, Extreme ultraviolet, Optical lithography, Scanning electron microscopy, Double patterning technology, Dry etching

Proceedings Article | 20 March 2018 Paper
Proc. SPIE. 10589, Advanced Etch Technology for Nanopatterning VII
KEYWORDS: Etching, Carbon monoxide, Chemistry, Plasma etching, Oxygen, Plasma, Directed self assembly, Nitrogen

Proceedings Article | 19 March 2018 Presentation
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Directed self assembly, Manufacturing, Etching, Annealing, Lithography, Chemistry, Temperature metrology, Wet etching, Dry etching, Photomasks

Proceedings Article | 13 March 2018 Presentation + Paper
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Directed self assembly, Annealing, Polymers

Proceedings Article | 27 March 2017 Presentation + Paper
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Directed self assembly, Annealing, Polymers, Scanning electron microscopy, Wet etching, Glasses

Showing 5 of 9 publications
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