Dr. Mary Ann Maher Profile

Dr. Mary Ann Maher

at SoftMEMS

SPIE Involvement:

Editor | Author

Publications (5)

SPIE Journal Paper | 16 December 2013 Open Access

Special Section Guest Editorial: Advanced Fabrication of MEMS and Photonic Devices

Georg von Freymann, Mary Ann Maher

JM3, Vol. 12, Issue 04, 041201, (December 2013) https://doi.org/10.1117/12.10.1117/1.JMM.12.4.041201

KEYWORDS: Microelectromechanical systems, Integrated optics, Active optics, Photonic devices, Sensors, Actuators, Biomedical optics, Metamaterials, Terahertz radiation, Quantum dots

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Proceedings Article | 10 April 2000 Paper

Moving from analysis to design: a MEMS CAD tool evolution

Karim Liateni, Hee Lee, Mary Ann Perez-Maher, Jean Michel Karam

Proceedings Volume 4019, (2000) https://doi.org/10.1117/12.382287

KEYWORDS: Computer aided design, Microelectromechanical systems, Solid modeling, Monte Carlo methods, Finite element methods, 3D modeling, Data modeling, Manufacturing, Systems modeling, Electronic design automation

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Proceedings Article | 28 May 1999 Paper

MEMS device systems design and verification tools for smart structures

Ying Xu, Patrick Chu, Hee Jung Lee, Mary Ann Perez-Maher

Proceedings Volume 3669, (1999) https://doi.org/10.1117/12.349693

KEYWORDS: Computer aided design, Microelectromechanical systems, Smart structures, Systems modeling, Device simulation, Control systems, Sensors, Solid modeling, Microsystems, Very large scale integration

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Proceedings Article | 10 March 1999 Paper

Structured CAD methodology for integrated MEMS and IC design

Linh Nguyen, Hee Jung Lee, Mary Ann Perez-Maher, Ying Xu

Proceedings Volume 3680, (1999) https://doi.org/10.1117/12.341209

KEYWORDS: Computer aided design, Microelectromechanical systems, Resonators, Instrument modeling, Data modeling, Electronics, Optimization (mathematics), 3D modeling, Solid modeling, Very large scale integration

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Proceedings Article | 20 July 1998 Paper

MEMS system design and verification tools

Mary Ann Perez-Maher, Hee Jung Lee

Proceedings Volume 3328, (1998) https://doi.org/10.1117/12.320196

KEYWORDS: Microelectromechanical systems, Computer aided design, Device simulation, 3D modeling, Data modeling, Instrument modeling, Systems modeling, Electronic circuits, Solids, Solid modeling

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