Ms. Mary Kate Boggiano Profile

Mary Kate Boggiano

Graduate Research Assistant at Univ of N Carolina/Chapel Hill

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Publications (3)

Proceedings Article | 4 May 2005 Paper

Photoresists for CO2-based next-generation microlithography

Mary Kate Boggiano, Colin Wood, Joseph DeSimone

Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.599565

KEYWORDS: Polymers, Fluorine, Photoresist materials, Lithography, Polymerization, Optical lithography, Imaging systems, Photoresist developing, Plasma etching, Semiconducting wafers

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Proceedings Article | 14 May 2004 Paper

Synthesis of photoresists for 157-nm microlithography using CO2

Mary Kate Boggiano, Joseph DeSimone

Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.535165

KEYWORDS: Absorbance, Photoresist materials, Polymers, Lithography, Etching, Resistance, Polymerization, Glasses, Optical lithography, Fluorine

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Proceedings Article | 12 June 2003 Paper

Alicyclic photoresists for CO2-based microlithography at 157 nm

Mary Kate Boggiano, Joseph DeSimone

Proceedings Volume 5039, (2003) https://doi.org/10.1117/12.485093

KEYWORDS: Polymers, Carbon dioxide, Photoresist materials, Absorbance, Polymerization, Lithography, Glasses, Optical lithography, Semiconducting wafers, Liquids

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