Dr. Maryam Souri Profile

Dr. Maryam Souri

at Veeco Instruments Inc

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Publications (2)

Proceedings Article | 26 August 2024 Paper

Mo/Si multilayer improvements for EUV photomask performance

Kenji Yamamoto, Antonio Checco, Katrina Rook, Maryam Souri, Marjorie Chee, Meng Lee

Proceedings Volume 13177, 1317713 (2024) https://doi.org/10.1117/12.3034862

KEYWORDS: Reflectivity, Extreme ultraviolet, Silicon, Simulations, Molybdenum, Ion beams, Interfaces, Photomasks, Transmission electron microscopy, Optical simulations

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Proceedings Article | 13 March 2024 Poster

Reactive ion beam etch of highly uniform slanted gratings for augmented reality applications

Maryam Souri, Vincent Ip, Matthias Falmbigl, Meng Lee, Mark Campo, Robert Caldwell

Proceedings Volume PC12913, PC129130M (2024) https://doi.org/10.1117/12.3001026

KEYWORDS: Etching, Reactive ion etching, Augmented reality, Semiconducting wafers, Optical gratings, Ion beams, Industrial applications, Blazed gratings, Wet etching, Waveguides

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