Marylyn Hoy Bennett
Retired
SPIE Involvement:
Author
Publications (19)

Proceedings Article | 12 May 2005 Paper
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Diffraction, Polarization, Sensors, Polarizers, Attenuators, Photomasks, Laser beam diagnostics, Binary data, Phase shifts, Diffraction gratings

Proceedings Article | 24 May 2004 Paper
Proc. SPIE. 5375, Metrology, Inspection, and Process Control for Microlithography XVIII
KEYWORDS: Defect detection, Imaging systems, Inspection, Reflectivity, Interferometry, Wavefronts, Heterodyning, Photomasks, Phase measurement, Phase shifts

SPIE Journal Paper | 1 April 2004
JM3 Vol. 3 Issue 02
KEYWORDS: Scanning electron microscopy, Photomasks, Metrology, Electron beams, Dimensional metrology, Electron microscopes, Inspection, Contamination, Semiconducting wafers, Sensors

SPIE Journal Paper | 1 April 2004
JM3 Vol. 3 Issue 02
KEYWORDS: Photomasks, Metrology, Scanning electron microscopy, Standards development, Dimensional metrology, Calibration, Electron beams, Semiconducting wafers, Instrument modeling, Semiconductors

Proceedings Article | 17 December 2003 Paper
Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Phase shifting, Metrology, Quartz, Inspection, Wavefronts, Refraction, Photomasks, Phase measurement, Semiconducting wafers, Phase shifts

Showing 5 of 19 publications
Proceedings Volume Editor (2)

Conference Committee Involvement (11)
SPIE 31st International Symposium on Advanced Lithography
19 February 2006 | San Jose, United States
Metrology, Inspection, and Process Control for Microlithography XIX
28 February 2005 | San Jose, California, United States
Metrology, Inspection, and Process Control for Microlithography XVIII
23 February 2004 | Santa Clara, California, United States
Microlithography 2004
22 February 2004 | Santa Clara, United States
Process and Materials Characterization and Diagnostics in IC Manufacturing II
27 February 2003 | Santa Clara, CA, United States
Showing 5 of 11 Conference Committees
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top