Dr. Masaaki Ichiki
Researcher at AIST
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 11 January 2008 Paper
Proc. SPIE. 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
KEYWORDS: Microelectromechanical systems, Semiconductors, Photovoltaics, Ferroelectric materials, Optical sensors, Optical properties, Electrodes, Crystals, Scanning electron microscopy, Lead

Proceedings Article | 9 January 2008 Paper
Proc. SPIE. 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
KEYWORDS: Microelectromechanical systems, Gold, Confocal microscopy, Metals, Temperature sensors, Finite element methods, Microfabrication, Molybdenum, Sensor technology, Temperature metrology

Proceedings Article | 22 December 2006 Paper
Proc. SPIE. 6413, Smart Materials IV
KEYWORDS: Microelectromechanical systems, Thin films, Ferroelectric materials, Annealing, Crystals, Silicon, Scanning electron microscopy, Sol-gels, Microwave radiation, Perovskite

Proceedings Article | 5 January 2006 Paper
Proc. SPIE. 6035, Microelectronics: Design, Technology, and Packaging II
KEYWORDS: Microelectromechanical systems, Semiconductors, Photovoltaics, Ferroelectric materials, Optical sensors, Optical properties, Crystals, Scanning electron microscopy, Lanthanum, Lead

Proceedings Article | 2 April 2004 Paper
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Microelectromechanical systems, Photovoltaics, Electrodes, Crystals, Ceramics, Scanning electron microscopy, Transducers, Photovoltaic materials, Lead, Perovskite

Showing 5 of 11 publications
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