Dr. Masafumi Fukuto
at Brookhaven National Lab.
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 13 March 2018 Presentation + Paper
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Nanostructures, Metrology, Genetic algorithms, Scattering, X-rays, Grazing incidence

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