Mr. Masakazu Tokita Profile

Masakazu Tokita

at NuFlare Technology Inc

SPIE Involvement:

Author

Publications (8)

Proceedings Article | 25 May 2010 Paper

Mask inspection system with variable sensitivity and printability verification function

Takafumi Inoue, Kenichi Takahara, Hideo Tsuchiya, Masakazu Tokita, Tadao Inoue, Masaki Yamabe

Proceedings Volume 7748, 77481G (2010) https://doi.org/10.1117/12.864415

KEYWORDS: Photomasks, Inspection, Defect detection, Semiconducting wafers, Data conversion, Image sensors, Databases, Image transmission, Source mask optimization

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Proceedings Article | 16 April 2010 Paper

Mask data rank and printability verification function of mask inspection system

Kenichi Takahara, Masakazu Tokita, Hideo Tsuchiya, Masaki Yamabe, Nobutaka Kikuiri, Kinya Usuda

Proceedings Volume 7638, 763833 (2010) https://doi.org/10.1117/12.846412

KEYWORDS: Inspection, Photomasks, Defect detection, Databases, Data conversion, Computer simulations, Semiconductors, Source mask optimization, Defect inspection, Optical proximity correction

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Proceedings Article | 23 September 2009 Paper

Defect printability analysis by lithographic simulation from high resolution mask images

George Chen, James Wiley, Jen-Shiang Wang, Rafael Howell, Shufeng Bai, Yi-Fan Chen, Frank Chen, Yu Cao, Tadahiro Takigawa, Yasuko Saito, Terunobu Kurosawa, Hideo Tsuchiya, Kinya Usuda, Masakazu Tokita, Fumio Ozaki, Nobutaka Kikuiri, Yoshitake Tsuji

Proceedings Volume 7488, 74880A (2009) https://doi.org/10.1117/12.831475

KEYWORDS: Photomasks, Inspection, Semiconducting wafers, Lithography, Scanners, Sensors, Image resolution, Optical inspection, Wafer-level optics, Printing

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Proceedings Article | 23 September 2009 Paper

Printability verification function of mask inspection system

Hideo Tsuchiya, Masaki Yamabe, Masakazu Tokita, Kenichi Takahara, Kinya Usuda, Fumio Ozaki, Nobutaka Kikuiri

Proceedings Volume 7488, 74880B (2009) https://doi.org/10.1117/12.829739

KEYWORDS: Inspection, Photomasks, Lithography, Defect detection, Image transmission, Semiconducting wafers, SRAF, Optical inspection, Telecommunications, Sensors

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Proceedings Article | 11 May 2009 Paper

Mask-LMC: lithographic simulation and defect detection from high-resolution mask images

George Chen, James Wiley, Jen-Shiang Wang, Rafael Howell, Shufeng Bai, Yi-Fan Chen, Frank Chen, Yu Cao, Tadahiro Takigawa, Terunobu Kurosawa, Hideo Tsuchiya, Kinya Usuda, Masakazu Tokita, Fumio Ozaki, Nobutaka Kikuiri, Yoshitake Tsuji

Proceedings Volume 7379, 73791B (2009) https://doi.org/10.1117/12.824288

KEYWORDS: Photomasks, Inspection, Lithography, Semiconducting wafers, Scanners, Sensors, Defect detection, Optical inspection, Wafer-level optics, Image resolution

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Proceedings Article | 11 May 2009 Paper

A study of mask inspection method with pattern priority and printability check

Masakazu Tokita, Hideo Tsuchiya, Takafumi Inoue, Tadao Inoue, Masaki Yamabe

Proceedings Volume 7379, 73792A (2009) https://doi.org/10.1117/12.824324

KEYWORDS: Inspection, Photomasks, Image processing, Defect detection, Data processing, Semiconducting wafers, Image sensors, Analytical research, Interfaces, Defect inspection

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Proceedings Article | 17 October 2008 Paper

Concurrent optimization of MDP, mask writing, and mask inspection for mask manufacturing cost reduction

Masaki Yamabe, Tadao Inoue, Masahiro Shoji, Hiroshi Yasuda, Hiromichi Hoshi, Masakazu Tokita

Proceedings Volume 7122, 712220 (2008) https://doi.org/10.1117/12.802966

KEYWORDS: Photomasks, Inspection, Manufacturing, Data conversion, Parallel processing, Diagnostics, System integration, Metals, Design for manufacturing, Semiconducting wafers

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Proceedings Article | 19 May 2008 Paper

Die-to-database mask inspection with variable sensitivity

Hideo Tsuchiya, Masakazu Tokita, Takehiko Nomura, Tadao Inoue

Proceedings Volume 7028, 70282I (2008) https://doi.org/10.1117/12.793088

KEYWORDS: Inspection, Photomasks, Defect detection, Data conversion, Algorithm development, Databases, Optical proximity correction, Multilayers, Analytical research, Semiconductors

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Showing 5 of 8 publications

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