Masaki Yamabe
self employed Consultant
SPIE Involvement:
Author
Publications (49)

Proceedings Article | 25 September 2010 Paper
Proc. SPIE. 7823, Photomask Technology 2010
KEYWORDS: Logic, Manufacturing, Inspection, Diagnostics, Parallel processing, Image transmission, Photomasks, Extreme ultraviolet, System integration, Vestigial sideband modulation

Proceedings Article | 27 May 2010 Paper
Proc. SPIE. 7748, Photomask and Next-Generation Lithography Mask Technology XVII
KEYWORDS: Semiconductors, Mirrors, Metals, Manufacturing, Inspection, Photomasks, SRAF, Data conversion, Analog electronics, Defect inspection

Proceedings Article | 25 May 2010 Paper
Proc. SPIE. 7748, Photomask and Next-Generation Lithography Mask Technology XVII
KEYWORDS: Logic, Inspection, Scanning electron microscopy, Software development, Photomasks, Optical proximity correction, Mask making, Analytical research, Data conversion, Vestigial sideband modulation

Proceedings Article | 25 May 2010 Paper
Proc. SPIE. 7748, Photomask and Next-Generation Lithography Mask Technology XVII
KEYWORDS: Electronics, Manufacturing, Reliability, Inspection, Magnetism, Diagnostics, Data processing, Photomasks, System integration, Environmental sensing

Proceedings Article | 25 May 2010 Paper
Proc. SPIE. 7748, Photomask and Next-Generation Lithography Mask Technology XVII
KEYWORDS: Logic, Power supplies, Photomasks, Beam shaping, Logic devices, Optical proximity correction, Analytical research, Analog electronics, Semiconducting wafers, Vestigial sideband modulation

Showing 5 of 49 publications
Proceedings Volume Editor (1)

Conference Committee Involvement (3)
Alternative Lithographic Technologies III
1 March 2011 | San Jose, California, United States
Alternative Lithographic Technologies II
23 February 2010 | San Jose, California, United States
Photomask and Next Generation Lithography Mask Technology XIV
17 April 2007 | Yokohama, Japan
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top