Dr. Masaki Yanagisawa
at Sumitomo Electric Industries Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 24 February 2020 Paper
Proc. SPIE. 11300, Vertical-Cavity Surface-Emitting Lasers XXIV
KEYWORDS: Wafer-level optics, Oxides, Optical fibers, Eye, Semiconducting wafers, Oxidation

Proceedings Article | 4 April 2011 Paper
Proc. SPIE. 7970, Alternative Lithographic Technologies III
KEYWORDS: Electron beam lithography, Etching, Reliability, Optical communications, Photomasks, Nanoimprint lithography, Reactive ion etching, Distributed feedback laser diodes, Semiconducting wafers, Diffraction gratings

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