Prof. Masamichi Fujihira Profile

Prof. Masamichi Fujihira

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Publications (2)

Proceedings Article | 11 May 2009 Paper

Adhesion control between resist patterns and photomask blank surfaces

Masaaki Kurihara, Sho Hatakeyama, Kouji Yoshida, Takaharu Nagai, Daisuke Totsukawa, Masaharu Fukuda, Yasutaka Morikawa, Hiroshi Mohri, Morihisa Hoga, Naoya Hayashi, Hiroyuki Ohtani, Masamichi Fujihira

Proceedings Volume 7379, 73790A (2009) https://doi.org/10.1117/12.824251

KEYWORDS: Chromium, Photomasks, Quartz, Surface roughness, Head-mounted displays, Scanning probe microscopy, Photoresist processing, Interfaces, Atomic force microscopy, Silicon

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Proceedings Article | 6 September 1995 Paper

Optical processing and recording by scanning near-field optic/atomic force microscope (SNOAM)

Kunio Nakajima, Yasuyuki Mitsuoka, Norio Chiba, Hiroshi Muramatsu, Tatsuaki Ataka, Masamichi Fujihira

Proceedings Volume 2535, (1995) https://doi.org/10.1117/12.218691

KEYWORDS: Near field optics, Near field scanning optical microscopy, Optical fibers, Photoresist materials, Optical signal processing, Image resolution, Near field, Silicon, Semiconducting wafers, Atomic force microscopy

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