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Masataka Shiratsuchi
at Toshiba Corp
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Publications (2)
Proceedings Article | 1 November 2007 Paper
Development of a captured image simulator for the differential interference contrast microscopes aiming to design 199 nm mask inspection tools
Masataka Shiratsuchi, Yoshinori Honguh, Ryoichi Hirano, Riki Ogawa, Masatoshi Hirono, Takehiko Nomura
Proceedings Volume 6730, 67304W (2007) https://doi.org/10.1117/12.747909
KEYWORDS: Digital image correlation, Prisms, Inspection, Microscopes, Diffraction, Phase shifting, Photomasks, Phase shifts, Image quality, Polarization
Proceedings Article | 15 May 2007 Paper
Development of a captured image simulator for 199-nm mask inspection tools
Proceedings Volume 6607, 66072J (2007) https://doi.org/10.1117/12.729002
KEYWORDS: Inspection, Diffraction, Photomasks, Chromium, Phase shifting, Glasses, Resolution enhancement technologies, Phase shifts, Optical design, Optical inspection
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