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Masayuki Tomoyasu
CEO at Amiko Consulting, LLC
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Author
Publications (3)
Proceedings Article | 17 March 2012 Paper
The effects of plasma exposure on low-k dielectric materials
J. Shohet, H. Ren, M. Nichols, H. Sinha, W. Lu, K. Mavrakakis, Q. Lin, N. Russell, M. Tomoyasu, G. Antonelli, S. Engelmann, N. Fuller, V. Ryan, Y. Nishi
Proceedings Volume 8328, 83280I (2012) https://doi.org/10.1117/12.917967
KEYWORDS: Plasma, Dielectrics, Ions, Vacuum ultraviolet, Ultraviolet radiation, Synchrotrons, Silicon, Nitrogen, Oxygen, Plasma systems
Proceedings Article | 19 May 2011 Paper
Damage to low-k porous organosilicate glass from vacuum-ultraviolet irradiation
J. Shohet, H. Sinha, H. Ren, M. Nichols, Y. Nishi, M. Tomoyasu, N. Russell
Proceedings Volume 8077, 80770S (2011) https://doi.org/10.1117/12.887691
KEYWORDS: Dielectrics, Vacuum ultraviolet, Plasma, Ultraviolet radiation, Ions, Semiconducting wafers, Glasses, Silicon, Plasma systems, Particles
Proceedings Article | 24 May 2004 Paper
Feedforward of mask open measurements on an integrated scatterometer to improve gate linewidth control
Matthew Sendelbach, Wesley Natzle, Charles Archie, Bill Banke, Dan Prager, Dan Engelhard, Jason Ferns, Asao Yamashita, Merritt Funk, Fumihiko Higuchi, Masayuki Tomoyasu
Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.537969
KEYWORDS: Semiconducting wafers, Etching, Critical dimension metrology, Calibration, Metrology, Control systems, Photomasks, Silver, Error analysis, Silicon
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