Mathias Holz
at nano analytik GmbH
SPIE Involvement:
Author
Publications (10)

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11610, Novel Patterning Technologies 2021
KEYWORDS: Nanotechnology, Lithography, Nanostructures, Optical sensors, Statistical analysis, Sensors, Manufacturing, Precision measurement, Nanofabrication, Wheatstone bridges

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11324, Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020
KEYWORDS: Actuators, Nanotechnology, Mirrors, Interferometers, Manufacturing, Physics, Control systems, Atomic force microscopy, Nanofabrication, Near field optics

Proceedings Article | 26 September 2019 Paper
Proc. SPIE. 11148, Photomask Technology 2019
KEYWORDS: Electron beams, Diamond, Metrology, Microscopy, Electron microscopes, Scanning probe lithography, Scanning electron microscopy, Atomic force microscope, Nanofabrication, Overlay metrology

Proceedings Article | 26 September 2019 Paper
Proc. SPIE. 11148, Photomask Technology 2019
KEYWORDS: Semiconductors, Actuators, Electron beams, Metrology, Inspection, Atomic force microscopy, Optical inspection, Photomasks, Charged particle optics, Chemical mechanical planarization

Proceedings Article | 26 March 2019 Paper
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Actuators, Metrology, Digital signal processing, Imaging systems, Silicon, Inspection, Field programmable gate arrays, Atomic force microscopy, Photomasks, Semiconducting wafers

Showing 5 of 10 publications
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