Dr. Mathias Krellmann Profile

Dr. Mathias Krellmann

at Fraunhofer-IPMS

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Author

Publications (4)

Proceedings Article | 14 February 2011 Paper

In situ surface topography measurement of MOEMS structures under laser exposure

Mathias Krellmann, Alexander Mai, Steffen Wolschke, Michael Wagner, Ulrike Dauderstädt, Dieter Schmeißer, Harald Schenk, Steffen Sinning

Proceedings Volume 7930, 793010 (2011) https://doi.org/10.1117/12.877062

KEYWORDS: Mirrors, Micromirrors, Interferometers, Spatial light modulators, In situ metrology, Microopto electromechanical systems, Error analysis, Interferometry, Objectives, Phase shifts

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Proceedings Article | 5 February 2010 Paper

Temperature measurement on MOEMS micromirror plates under illumination

Ingo Wullinger, Peter Dürr, Klaus Lukat, Mathias Krellmann, Aravind Narayana Samy, Ulrike Dauderstädt, Dirk Rudloff, Michael Wagner, Detlef Kunze

Proceedings Volume 7592, 75920P (2010) https://doi.org/10.1117/12.842066

KEYWORDS: Mirrors, Temperature metrology, Convection, Micromirrors, Microopto electromechanical systems, Resistors, Calibration, Resistance, Photonic microstructures, Microsystems

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Proceedings Article | 6 January 2006 Paper

Bending of aluminum alloy beams depending on irradiance and repetition rate of UV laser radiation

Mathias Krellmann, Martin Friedrichs, Michael Wagner, Ulrike Dauderstädt, Hubert Lakner

Proceedings Volume 6111, 611109 (2006) https://doi.org/10.1117/12.647358

KEYWORDS: Ultraviolet radiation, Aluminum, Microopto electromechanical systems, Excimer lasers, Interferometers, Semiconductors, Lithography, Materials processing, Laser ablation, Mirror structures

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Proceedings Article | 20 January 2003 Paper

Operation of spatial light modulators in DUV light

Peter Duerr, Tord Karlin, Lars Leonardsson, Horst Wendrock, Uldis Berzinsh, Mathias Krellmann, Ulrike Dauderstaedt

Proceedings Volume 4985, (2003) https://doi.org/10.1117/12.477805

KEYWORDS: Electrodes, Mirrors, Spatial light modulators, Titanium, Deep ultraviolet, Ultraviolet radiation, Oxides, Laser development, Aluminum, Oxygen

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