CONFERENCE PROCEEDINGS
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Prof. Mathieu Luet
at ELDIM
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Author
Publications (4)
Proceedings Article | 20 October 2004 Paper
Rapid photo-goniometric technique for LED emission characterization
Pierre Boher, Mathieu Luet, Thierry Leroux
Proceedings Volume 5530, (2004) https://doi.org/10.1117/12.563937
KEYWORDS: Light emitting diodes, Semiconductor lasers, Sensors, Polarization, CCD image sensors, Laser damage threshold, Optical filters, Fourier transforms, Fourier optics, Charge-coupled devices
Proceedings Article | 10 September 2004 Paper
Light-scattered measurements using Fourier optics: a new tool for surface characterization
Pierre Boher, Mathieu Luet, Thierry Leroux
Proceedings Volume 5457, (2004) https://doi.org/10.1117/12.545390
KEYWORDS: Bidirectional reflectance transmission function, Fourier optics, Sensors, Light scattering, Air contamination, Polarization, Printing, Optical testing, Scattering, Polarizers
Proceedings Article | 24 May 2004 Paper
Innovative rapid photogoniometry method for CD metrology
Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.533426
KEYWORDS: Diffraction, Diffraction gratings, Fourier optics, Reflection, Polarization, Spectroscopic ellipsometry, CCD image sensors, Refractive index, Silicon, Sensors
Proceedings Article | 24 May 2004 Paper
A new analysis strategy for CD metrology using rapid photo goniometry method
Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.533031
KEYWORDS: Diffraction gratings, Diffraction, Scanning electron microscopy, Critical dimension metrology, Spectroscopic ellipsometry, Polarizers, Specular reflections, Photoresist materials, CCD image sensors, Sensors
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