Prof. Matiar M. R. Howlader Profile

Prof. Matiar M. R. Howlader

at McMaster Univ

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Author

Publications (3)

SPIE Journal Paper | 1 October 2010

Comparative annealing effect on bonded wafers in air and ultrahigh vacuum for microelectromechanical systems/microfluidics packaging

Matiar Howlader, Tadatomo Suga

JM3, Vol. 9, Issue 04, 041107, (October 2010) https://doi.org/10.1117/12.10.1117/1.3500747

KEYWORDS: Interfaces, Silicon, Annealing, Semiconducting wafers, Plasma, Microelectromechanical systems, Reactive ion etching, Packaging, Oxides, Microfluidics

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Proceedings Article | 21 September 2010 Paper

Annealed proton-exchanged LiNbO3 ridge waveguide for photonics application

Jian Sun, Wanguo Liang, Yi Gan, Qingyang Xu, Chang-qing Xu, Matiar Howlader, Koji Nakamura, Tadashi Kishimoto

Proceedings Volume 7750, 77500M (2010) https://doi.org/10.1117/12.871851

KEYWORDS: Waveguides, Annealing, Refractive index, Diamond, Wave propagation, Hydrogen, Light wave propagation, Crystals, Semiconducting wafers, Photonics

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Proceedings Article | 5 February 2010 Paper

MEMS/microfluidics packaging without heating

Matiar Howlader

Proceedings Volume 7592, 75920H (2010) https://doi.org/10.1117/12.845291

KEYWORDS: Reactive ion etching, Oxygen, Plasma, Annealing, Interfaces, Silicon, Surface roughness, Oxides, Packaging, Nitrogen

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