Mr. Matthew T. Cook Profile

Matthew T. Cook

at MIT Lincoln Lab

SPIE Involvement:

Author

Publications (5)

Proceedings Article | 23 August 2021 Presentation + Paper

Manufacture and performance of blazed soft x-ray transmission gratings for Arcus and Lynx

Ralf Heilmann, Alexander Bruccoleri, Jungki Song, Bethany Levenson, Brian Smallshaw, Mallory Whalen, Alan Garner, Sarah Trowbridge Heine, Herman Marshall, Matthew Cook, James Gregory, Renee Lambert, Dmitri Shapiro, Douglas Young, Eric Gullikson, Tomoyuki Nonaka, Akimi Uchida, Manuel Quijada, Ed Hertz, Peter Cheimets, Randall Smith, Mark Schattenburg

Proceedings Volume 11822, 1182215 (2021) https://doi.org/10.1117/12.2594951

KEYWORDS: Diffraction gratings, Computed tomography, Semiconducting wafers, X-rays, Diffraction, Etching, Deep reactive ion etching, Photomasks, Optical alignment, X-ray diffraction

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Proceedings Article | 13 December 2020 Presentation + Paper

Towards volume manufacturing of high-performance soft x-ray critical-angle transmission gratings

Ralf Heilmann, Alexander Bruccoleri, Jungki Song, Matthew Cook, James Gregory, Renee Lambert, Dimitri Shapiro, Douglas Young, Miranda Bradshaw, Vadim Burwitz, Gisela Hartner, Andreas Langmeier, Randall Smith, Mark Schattenburg

Proceedings Volume 11444, 114441H (2020) https://doi.org/10.1117/12.2562388

KEYWORDS: Diffraction gratings, X-rays, Manufacturing, Spectroscopy, Computed tomography, Diffraction, Absorption, Emission spectroscopy, Diagnostics, Plasmas

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Proceedings Article | 9 September 2019 Presentation + Paper

Towards megapixel-class germanium charge-coupled devices for broadband x-ray detectors

C. Leitz, M. Zhu, S. Rabe, B. Burke, D. Young, D. O'Mara, I. Prigozhin, K. Ryu, M. Cooper, R. Reich, K. Johnson, M. Cook, C. Stull, S. Zarr

Proceedings Volume 11118, 1111802 (2019) https://doi.org/10.1117/12.2528158

KEYWORDS: Charge-coupled devices, Germanium, Silicon, Semiconducting wafers, Metals, X-rays, X-ray detectors, Particles, Sensors, Lithography

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Proceedings Article | 6 July 2018 Presentation + Paper

Development of germanium charge-coupled devices

C. Leitz, M. Zhu, S. Rabe, B. Burke, I. Prigozhin, D. O'Mara, K. Ryu, M. Cooper, R. Reich, K. Johnson, W. Hu, B. Felton, M. Cook, C. Stull, V. Suntharalingam

Proceedings Volume 10709, 1070908 (2018) https://doi.org/10.1117/12.2310120

KEYWORDS: Charge-coupled devices, Germanium, X-rays, X-ray detectors

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Proceedings Article | 27 March 2017 Paper

High-resolution, high-throughput, CMOS-compatible electron-beam patterning

Melissa Smith, Steven Vitale, Theodore Fedynyshyn, Matthew Cook, Joel Maldonado, Dmitri Shapiro, Mordechai Rothschild

Proceedings Volume 10146, 101461H (2017) https://doi.org/10.1117/12.2256649

KEYWORDS: Electron beam lithography, Maskless lithography, Etching, Photoresist processing, Silicon, Photoresist materials, Microfabrication, Lithography, Semiconducting wafers, Critical dimension metrology, Resistance

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