Mr. Matthew L. Crank Profile

Matthew L. Crank

at SA Photonics Inc

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Author

Publications (2)

Proceedings Article | 23 March 2010 Paper

Comparison of EUV spectral and ion emission features from laser-produced Sn and Li plasmas

R. Coons, D. Campos, M. Crank, S. Harilal, A. Hassanein

Proceedings Volume 7636, 763636 (2010) https://doi.org/10.1117/12.848318

KEYWORDS: Plasmas, Tin, Lithium, Ions, Extreme ultraviolet, Coded apertures, Extreme ultraviolet lithography, Chemical species, Nd:YAG lasers, Spectrographs

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Proceedings Article | 20 March 2010 Paper

Angular distribution of debris from CO[sub]2[/sub] and YAG laser-produced tin plasmas

D. Campos, R. Coons, M. Fields, M. Crank, S. Harilal, A. Hassanein

Proceedings Volume 7636, 763612 (2010) https://doi.org/10.1117/12.848333

KEYWORDS: Nd:YAG lasers, Plasmas, Ions, Carbon dioxide, Carbon dioxide lasers, Extreme ultraviolet, Tin, YAG lasers, Extreme ultraviolet lithography, Emission spectroscopy

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