Dr. Matthew Hankinson
Lithography Programs Mktg Mgr at KLA Corp
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 24 May 2004 Paper
Proc. SPIE. 5375, Metrology, Inspection, and Process Control for Microlithography XVIII
KEYWORDS: Scatterometry, Semiconducting wafers, Scatter measurement, Scanning electron microscopy, Critical dimension metrology, Metrology, Manufacturing, Electrodes, Data modeling, Capacitance

Proceedings Article | 29 April 2004 Paper
Proc. SPIE. 5378, Data Analysis and Modeling for Process Control
KEYWORDS: Critical dimension metrology, Lithography, Semiconducting wafers, Process control, Spectroscopic ellipsometry, Metrology, Manufacturing, Overlay metrology, Photomasks, Resolution enhancement technologies

Proceedings Article | 16 July 2002 Paper
Proc. SPIE. 4689, Metrology, Inspection, and Process Control for Microlithography XVI
KEYWORDS: Semiconducting wafers, Process control, Manufacturing, Information operations, Critical dimension metrology, Process modeling, Metrology, Etching, Lithography, Adaptive optics

Proceedings Article | 16 July 2002 Paper
Proc. SPIE. 4689, Metrology, Inspection, and Process Control for Microlithography XVI
KEYWORDS: Overlay metrology, Process modeling, Process control, Metrology, Error analysis, Statistical modeling, Statistical analysis, Control systems, Device simulation, Semiconducting wafers

Proceedings Article | 5 July 2000 Paper
Proc. SPIE. 4000, Optical Microlithography XIII
KEYWORDS: Reticles, Photomasks, Optical proximity correction, Binary data, Critical dimension metrology, Photoresist materials, Manufacturing, Deep ultraviolet, 193nm lithography, Optical lithography

Proceedings Volume Editor (1)

SPIE Conference Volume | 1 July 2003

Conference Committee Involvement (4)
Data Analysis and Modeling for Patterning Control III
23 February 2006 | San Jose, California, United States
Data Analysis and Modeling for Process Control II
3 March 2005 | San Jose, California, United States
Data Analysis and Modeling for Process Control
26 February 2004 | Santa Clara, California, United States
Advanced Process Control and Automation
27 February 2003 | Santa Clara, CA, United States
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