Matthew McQuillan
at Naval Surface Warfare Ctr Dahlgren Div
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 16 April 2008 Paper
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Metrology, Etching, Image processing, Manufacturing, Scanning electron microscopy, Image quality, Process control, Optical alignment, Critical dimension metrology, Iterated function systems

Proceedings Article | 20 March 2006 Paper
Proc. SPIE. 6154, Optical Microlithography XIX
KEYWORDS: Diffraction, Reticles, Metrology, Calibration, Quartz, Scanners, Semiconducting wafers, Overlay metrology, Phase shifts, Diffraction gratings

Proceedings Article | 28 May 2004 Paper
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Monochromatic aberrations, Reticles, Metrology, Data modeling, Calibration, Matrices, Scanners, Image analysis, Photoresist materials, Semiconducting wafers

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