Dr. Matthias Cumme
at Carl Zeiss Jena GmbH
SPIE Involvement:
Author
Publications (14)

Proceedings Article | 27 August 2015 Paper
Proc. SPIE. 9575, Optical Manufacturing and Testing XI
KEYWORDS: Polishing, Silica, Calibration, Etching, Silicon, Surface roughness, Atomic force microscopy, Ion beams, Measurement devices, Reactive ion etching

Proceedings Article | 6 February 2008 Paper
Proc. SPIE. 6883, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics
KEYWORDS: Microlens array, Etching, Ions, Calcium, Photoresist materials, Diffusers, Photomasks, Semiconducting wafers, Optics manufacturing, Binary data

Proceedings Article | 15 October 2005 Paper
Proc. SPIE. 5962, Optical Design and Engineering II
KEYWORDS: Optical components, Lithographic illumination, Silica, Polarization, Polarizers, Optical testing, Near field, Beam shaping, Binary data, Near field optics

Proceedings Article | 12 May 2005 Paper
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Lithography, Diffraction, Lithographic illumination, Diffractive optical elements, Silica, Inspection, Control systems, Near field, Beam shaping, Optical alignment

Proceedings Article | 3 November 2003 Paper
Proc. SPIE. 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II
KEYWORDS: Fabrication, Lithography, Silica, Calibration, Etching, Semiconductor lasers, Photomasks, Beam shaping, Chemical elements, Photoresist processing

Showing 5 of 14 publications
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