Dr. Meike Hofmann Profile

Dr. Meike Hofmann

at TU Ilmenau

SPIE Involvement:

Author

Publications (9)

SPIE Journal Paper | 22 December 2021 Open Access

Perspectives of reactive ion etching of silicate glasses for optical microsystems

Christoph Weigel, Ulrike Brokmann, Meike Hofmann, Arne Behrens, Edda Rädlein, Martin Hoffmann, Steffen Strehle, Stefan Sinzinger

JOM, Vol. 1, Issue 04, 040901, (December 2021) https://doi.org/10.1117/12.10.1117/1.JOM.1.4.040901

KEYWORDS: Etching, Glasses, Reactive ion etching, Optical microsystems, Plasma, Ions, Silicate glass, Silicon, Crystals, Fluorine

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Proceedings Article | 4 November 2016 Paper

Multimode interference structures as sensing elements integrated into Mach-Zehnder interferometers in polymer foils

Yanfen Xiao, Alexa Langenecker, Meike Hofmann, Stanislav Sherman, Uwe Gleissner, Claas Mueller, Hans Zappe

Proceedings Volume 10025, 100250V (2016) https://doi.org/10.1117/12.2247610

KEYWORDS: Polymers, Sensors, Refractive index, Mach-Zehnder interferometers, Brain-machine interfaces, Waveguides, Structural sensing, Glucose, Water, Chemical elements

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Proceedings Article | 27 April 2016 Paper

Temperature characterization of integrated optical all-polymer Mach-Zehnder interferometers

Yanfen Xiao, Meike Hofmann, Ziyu Wang, Alexa Langenecker, Stanislav Shermann, Uwe Gleissner, Hans Zappe

Proceedings Volume 9888, 98880F (2016) https://doi.org/10.1117/12.2224460

KEYWORDS: Sensors, Temperature metrology, Polymers, Refractive index, Waveguides, Integrated optics, Mach-Zehnder interferometers, Fabrication, Information technology, Cladding

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Proceedings Article | 27 April 2016 Paper

Optical temperature sensing on flexible polymer foils

Stanislav Sherman, Yanfen Xiao, Meike Hofmann, Thomas Schmidt, Uwe Gleissner, Hans Zappe

Proceedings Volume 9888, 98880I (2016) https://doi.org/10.1117/12.2227470

KEYWORDS: Waveguides, Polymers, Polymer multimode waveguides, Sensors, Refractive index, Polymeric sensors, Waveguides, Sensors, Polymer multimode waveguides, Temperature metrology, Polymethylmethacrylate, Temperature sensors, Thermal optics

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Proceedings Article | 1 March 2016 Paper

Integrated all-polymer Mach-Zehnder interferometers without interaction window in asymmetric configuration

Yanfen Xiao, Meike Hofmann, Ziyu Wang, Stanislav Sherman, Pei Li, Hans Zappe

Proceedings Volume 9750, 97501V (2016) https://doi.org/10.1117/12.2228391

KEYWORDS: Polymers, Waveguides, Mach-Zehnder interferometers, Integrated optics, Sensors, Information technology, Interferometers, Photorefractive polymers

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Proceedings Article | 24 September 2015 Paper

Inkjet printed single-mode waveguides on hot-embossed foils

Meike Hofmann, Yanfen Xiao, Stanislav Sherman, Patrick Bollgrün, Thomas Schmidt, Uwe Gleissner, Hans Zappe

Proceedings Volume 9628, 96281R (2015) https://doi.org/10.1117/12.2191335

KEYWORDS: Waveguides, Printing, Inkjet technology, Polymers, Refractive index, Sensors, Ultraviolet radiation, Additive manufacturing, Polymer multimode waveguides, Cladding

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Proceedings Article | 27 February 2015 Paper

Design and simulation of integrated optical interferometers fabricated in polymer foils

Yanfen Xiao, Meike Hofmann, Hans Zappe

Proceedings Volume 9365, 93651F (2015) https://doi.org/10.1117/12.2079276

KEYWORDS: Waveguides, Refractive index, Sensors, Polymers, Semiconductor lasers, Integrated optics, Polymer multimode waveguides, Polymeric sensors, Waveguide modes, Phase shifts

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Proceedings Article | 27 September 2011 Paper

Computer-aided manufacturing for freeform optical elements by ultraprecision micromilling

Sebastian Stoebenau, Roman Kleindienst, Meike Hofmann, Stefan Sinzinger

Proceedings Volume 8126, 812614 (2011) https://doi.org/10.1117/12.893750

KEYWORDS: Computer programming, Optical components, Micro cutting, Beam shaping, Chemical elements, Optics manufacturing, Data modeling, Freeform optics, Spindles, Solids

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Proceedings Article | 13 May 2010 Paper

Highly integrated optical microsystem for particle concentration measurement

Meike Hofmann, Xuan Ma, Jan Schneider, Stefan Sinzinger

Proceedings Volume 7716, 77160T (2010) https://doi.org/10.1117/12.854219

KEYWORDS: Particles, Light sources, Sensors, Diffraction gratings, Vertical cavity surface emitting lasers, Light scattering, Integrated optics, Interferometers, System integration, Scattering

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We present our research on integrated optical Talbot interferometers for particle mass concentration measurements. For optimum integration of highly sensitive optical measurement systems we apply a planar emitter-receiver-unit with a vertical cavity surface emitting laser (VCSEL) at 850 nm as light source. The optical system is integrated into a planar transparent PMMA (polymethylmethacrylate) substrate. We suggest a planar integrated free-space optical system for monitoring the particle mass concentration of polydisperse suspensions. Thorough simulations of the optical sensor show that for the required regime of particle concentration and particle size distribution (PSD) turbidity measurements where the attenuation of a light beam is evaluated for example at different wavelengths do not provide the required measurement precision. We therefore propose a system where the probe beam even though sent through the system is blocked before reaching the detector by an interferometric setup. The stray light originating from the particles is exploited for the measurement. For our application we focus on particles with sizes in the range 1 - 120 μm and particle mass concentrations in the range of 1-10 mg/L. In this case significant strength of the scattering signal only appears in small angles relative to the incident probe beam (forward scattering). The probe beam and the stray light thus overlap to a large extent. Our sensor concept is based on a monolithically integrated Talbot interferometer. Two properly aligned diffraction gratings are used to remove the primary beam. We use a stripe detector as second grating. The stray light causes perturbations within the formation of the self image of the grating. These perturbations are visualized as speckles on a detector and exploited for particle concentration measurements. The potential of the sensor concept is presented on the example of a modular Talbot interferometer using a HeNe laser at 633 nm to measure particle mass concentrations between 1 mg/L and 250 mg/L of Arizona test dust. We present the results of our investigations concerning the generation of Talbot self images in the planar configuration using a diverging multimode VCSEL light source. Furthermore we discuss the design and demonstrate the fabrication of a planar optical test system containing the integrated passive optical elements necessary for forming an integrated Talbot interferometer. Light source and sensor are positioned on a separate chip.

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