Mélanie Cloutier
Cleanroom Technician at Univ de Sherbrooke
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 11 May 2010 Paper
Proc. SPIE. 7712, Nanophotonics III
KEYWORDS: Optical microcavities, Photonic crystals, Waveguides, Nanophotonics, Silicon, Reflectivity, Nanotechnology, Waveguide modes, Mirrors, Nanowires

Proceedings Article | 20 May 2004 Paper
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Photomasks, Charged-particle lithography, Etching, Electron beam lithography, Reactive ion etching, Mask making, Nickel, Optical lithography, Plating, Lithography

Proceedings Article | 14 May 2004 Paper
Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI
KEYWORDS: Electron beam lithography, Photomasks, Semiconductor lasers, Lithography, Coating, Etching, Silicon, Zone plates, Semiconducting wafers, Electron beams

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