Melissa Zaverton
Optical Engineer at BAE Systems
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 17 April 2015 Paper
Proc. SPIE. 9374, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII
KEYWORDS: Waveguides, Mirrors, Photomasks, Optical alignment, Thin film coatings, Lithography, Cladding, Integrated optics, Silicon, Chromium

Proceedings Article | 13 March 2015 Paper
Proc. SPIE. 9374, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VIII
KEYWORDS: Imaging systems, Phase contrast, Optical alignment, Mirrors, Polymers, Lithography, Optical interconnects, Waveguides, Microscopes, Objectives

Proceedings Article | 15 September 2014 Paper
Proc. SPIE. 9170, Nanoengineering: Fabrication, Properties, Optics, and Devices XI
KEYWORDS: Mirrors, Lithography, Interferometers, Scanning electron microscopy, Surface roughness, Objectives, Optical fabrication, Thin film coatings, Waveguides, Profilometers

SPIE Journal Paper | 6 August 2014
OE Vol. 53 Issue 08
KEYWORDS: Image processing, Inspection, Raster graphics, Photoresist materials, Defect detection, Sensors, Digital filtering, Optical lithography, Laser scanners, Image registration

Proceedings Article | 7 March 2014 Paper
Proc. SPIE. 8974, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VII
KEYWORDS: Lithography, Mirrors, Optical circuits, Optical alignment, Photomasks, Fabrication, Integrated optics, Micro optics, Photoresist materials, Double patterning technology

Showing 5 of 7 publications
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