Dr. Michal Józwik Profile

Dr. Michal Józwik

at Warsaw Univ of Technology

SPIE Involvement:

Conference Program Committee | Author

Publications (51)

Proceedings Article | 12 March 2024 Poster + Paper

Phase from defocus: transport of intensity or in-line holography?

Mikołaj Rogalski, Piotr Arcab, Emilia Wdowiak, Michał Józwik, Maciej Trusiak

Proceedings Volume 12852, 128520L (2024) https://doi.org/10.1117/12.3008453

KEYWORDS: Holography, Digital holography, Phase reconstruction, Microscopy, Physical coherence, Image restoration, Holograms, Phase imaging, Optical microscopy, Light sources and illumination

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Proceedings Article | 17 May 2022 Presentation + Paper

Multi-incident holography profilometry for low- and high gradient object

Moncy S. Idicula, Patryk Mitura, Michal Józwik, Hyon-Gon Choo, Juan Martínez-Carranza, Kai Wen, Tomasz Kozacki

Proceedings Volume 12138, 121380L (2022) https://doi.org/10.1117/12.2624437

KEYWORDS: Reconstruction algorithms, Holograms, Holography, Digital holography, Optical filters, Fourier transforms, Spatial light modulators, 3D metrology, Wave propagation, Mirrors

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Proceedings Article | 12 September 2021 Presentation + Paper

Optical design of an ultraviolet hybrid refractive-diffractive space telescope for photometry

Grzegorz Fluder, Zdzisław Choromański, Jerzy Krezel, Michal Józwik

Proceedings Volume 11871, 118710L (2021) https://doi.org/10.1117/12.2597130

KEYWORDS: Ultraviolet radiation, Point spread functions, Diffraction, Diffractive optical elements, Tolerancing, Space telescopes, Telescopes, Antireflective coatings, Optical design, Ultraviolet telescopes

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Proceedings Article | 7 September 2018 Paper

Height reconstruction algorithm for multi-incidence digital holography

Marta Mikula, Tomasz Kozacki, Julianna Winnik, Michał Józwik, Juan Martinez-Carranza

Proceedings Volume 10834, 1083424 (2018) https://doi.org/10.1117/12.2319706

KEYWORDS: Reconstruction algorithms, Digital holography, Phase measurement, Holography, Microlens, Algorithm development, Holograms, Computer simulations, Holographic interferometry, Interferometry

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Proceedings Article | 7 September 2018 Paper

Wavefront reconstruction from two lateral shearing interferograms with Hilbert–Huang transform in monitoring of high power laser beam quality

Michał Józwik, Rafał Kukołowicz, Zofia Markiewicz

Proceedings Volume 10834, 1083413 (2018) https://doi.org/10.1117/12.2318045

KEYWORDS: Wavefronts, Wavefront reconstruction, Fringe analysis, High power lasers, Zernike polynomials, Interferometry, Reconstruction algorithms, Absorption, Wavefront sensors

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Proceedings Article | 18 August 2018 Paper

Improvement of topography measurement using denoising approach in Fourier digital holographic microscopy

Marta Mikuła, Tomasz Kozacki, Michał Józwik, Julianna Winnik, Piotr Zdańkowski

Proceedings Volume 10749, 107491E (2018) https://doi.org/10.1117/12.2505440

KEYWORDS: Holograms, Optical spheres, Spherical lenses, Digital holography, Reconstruction algorithms, 3D image processing, Signal to noise ratio, Denoising, Holography, Microscopy

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Proceedings Article | 26 June 2017 Paper

Topography measurements of high NA aspherical microlenses by digital holographic microscopy with spherical illumination

Michal Józwik, Marta Mikuła, Tomasz Kozacki, Julianna Kostencka, Christophe Gorecki

Proceedings Volume 10329, 103290C (2017) https://doi.org/10.1117/12.2270150

KEYWORDS: Digital holography, Spherical lenses, Microlens, Microscopy, Aspheric lenses, Reflection, Reconstruction algorithms, Optical spheres

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Proceedings Article | 8 December 2016 Paper

Optical methods for measurements of surface shape in optical components for high power laser beam forming

Michał Józwik, Maciej Trusiak, Kamil Liżewski, Juan Martínez-Carranza, Nikolay Voznesenskiy, Małgorzata Kujawińska

Proceedings Volume 10159, 1015915 (2016) https://doi.org/10.1117/12.2263537

KEYWORDS: Interferometry, Optical testing, Optical components, High power lasers, Fringe analysis, Point diffraction interferometers, Wavefronts, Quality measurement, Interferometers, Optical spheres

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Proceedings Article | 28 August 2016 Presentation + Paper

Recent advances in phase shifted time averaging and stroboscopic interferometry

Adam Styk, Michał Józwik

Proceedings Volume 9960, 99600A (2016) https://doi.org/10.1117/12.2238519

KEYWORDS: Interferometry, Phase shifts, Time metrology, Phase shifting, Modulation, Error analysis, Bessel functions, Photovoltaics, Data processing, Visualization

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Proceedings Article | 1 September 2015 Paper

Two detector, active digital holographic camera for 3D imaging and digital holographic interferometry

Jakub Żak, Małgorzata Kujawińska, Michał Józwik

Proceedings Volume 9576, 95760Q (2015) https://doi.org/10.1117/12.2188219

KEYWORDS: Sensors, Holograms, Cameras, Digital holography, Liquid crystal on silicon, Holographic interferometry, Holography, Spatial light modulators, Diffraction gratings, Phase shifts

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Proceedings Article | 24 August 2015 Paper

Synthetic aperture double exposure digital holographic interferometry for wide angle measurement and monitoring of mechanical displacements

M. Kujawinska, P. Makowski, G. Finke, J. Zak, M. Józwik, T. Kozacki

Proceedings Volume 9660, 966019 (2015) https://doi.org/10.1117/12.2196138

KEYWORDS: Holograms, Spatial light modulators, Digital holography, Holographic interferometry, Holography, Sensors, Charge-coupled devices, Wavefronts, Interferometry, Spherical lenses

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Proceedings Article | 16 December 2014 Paper

On accuracy of holographic shape measurement method with spherical wave illumination

Marta Mikuła, Tomasz Kozacki, Julianna Kostencka, Kamil Liżewski, Michał Józwik

Proceedings Volume 9290, 92900P (2014) https://doi.org/10.1117/12.2075807

KEYWORDS: Reconstruction algorithms, Microlens, Spherical lenses, Picosecond phenomena, Digital holography, Holography, Microscopes, Error analysis, Reflectivity, Imaging systems

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Proceedings Article | 18 August 2014 Paper

Comparison of phase retrieval techniques based on the transport of intensity equation using equally and unequally spaced plane separation criteria

J. Martinez-Carranza, K. Falaggis, M. Jozwik, T. Kozacki

Proceedings Volume 9204, 92040G (2014) https://doi.org/10.1117/12.2061976

KEYWORDS: General packet radio service, Phase retrieval, Contrast transfer function, Wave propagation, Error analysis, Spatial frequencies, Interferometry, Neodymium, Visualization, Beam splitters

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Proceedings Article | 31 December 2013 Paper

Micro-optics in advanced optical metrology

Michał Józwik

Proceedings Volume 9042, 904202 (2013) https://doi.org/10.1117/12.2037501

KEYWORDS: Semiconducting wafers, Interferometers, Wafer-level optics, Inspection, Diffraction gratings, Glasses, Cameras, Beam splitters, Interferometry, Micro optics

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Proceedings Article | 13 September 2012 Paper

Accurate and quantitative phase retrieval methods for a series of defocused images with application to in-line Gabor microscopy

Konstantinos Falaggis, Tomasz Kozacki, Michal Jozwik, Malgorzata Kujawinska

Proceedings Volume 8493, 84930X (2012) https://doi.org/10.1117/12.929303

KEYWORDS: Cameras, Spatial frequencies, Sensors, Phase retrieval, Holography, Holograms, Digital holography, Microscopes, Phase measurement, Spatial resolution

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Proceedings Article | 5 May 2012 Paper

Interferometry of AlN-based microcantilevers to determine the material properties and failure mechanisms

Christophe Gorecki, Katarzyna Krupa, Michał Józwik

Proceedings Volume 8430, 84300D (2012) https://doi.org/10.1117/12.922887

KEYWORDS: Aluminum nitride, Reliability, Electrodes, Resistance, Interferometry, Humidity, Microelectromechanical systems, Thin films, Finite element methods, Temperature metrology

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Proceedings Article | 5 May 2012 Paper

On topography characterization of micro-optical elements with large numerical aperture using digital holographic microscopy

K. Liżewski, T. Kozacki, M. Józwik, J. Kostencka

Proceedings Volume 8430, 84300G (2012) https://doi.org/10.1117/12.923047

KEYWORDS: Microlens, Digital holography, Reconstruction algorithms, Imaging systems, Holography, Optical components, Microscopes, Algorithm development, Beam splitters, Microscopy

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Proceedings Article | 3 November 2011 Paper

Parallel approach to MEMS and micro-optics interferometric testing

M. Kujawińska, S. Beer, K. Gastinger, C. Gorecki, K. Haugholt, M. Józwik, P. Lambelet, R. Paris, A. Styk, U. Zeitner

Proceedings Volume 8011, 80117O (2011) https://doi.org/10.1117/12.903256

KEYWORDS: Semiconducting wafers, Interferometers, Inspection, Diffractive optical elements, Wafer-level optics, Imaging systems, Interferometry, Lithium, Microelectromechanical systems, Micro optics

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Proceedings Article | 2 August 2010 Paper

Design, technology, and signal processing for DOE-based microinterferometer array applied in new generation M(O)EMS test equipment

M. Kujawinska, M. Józwik, A. Styk, U. Zeitner, A. Røyset, S. Beer, R. Moosburger, C. Gorecki, K. Gastinger

Proceedings Volume 7791, 779103 (2010) https://doi.org/10.1117/12.862170

KEYWORDS: Interferometers, Semiconducting wafers, Cameras, Lithium, Imaging systems, Inspection, Diffraction gratings, Demodulation, Signal processing, Wafer-level optics

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Proceedings Article | 14 May 2010 Paper

Next-generation test equipment for micro-production

Kay Gastinger, Lars Johnsen, Malgorzata Kujawinska, Michal Jozwik, Uwe Zeitner, Peter Dannberg, Jorge Albero, Sylwester Bargiel, Christoph Schaeffel, Stephan Beer, Rudolf Moosburger, Patrick Lambelet, Marco Pizzi

Proceedings Volume 7718, 77180F (2010) https://doi.org/10.1117/12.855087

KEYWORDS: Semiconducting wafers, Interferometers, Inspection, Imaging systems, Cameras, Mirrors, Lithium, Glasses, Wafer-level optics, Diffraction gratings

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Proceedings Article | 17 June 2009 Paper

Optical, mechanical, and electro-optical design of an interferometric test station for massive parallel inspection of MEMS and MOEMS

Kay Gastinger, Karl Henrik Haugholt, Malgorzata Kujawinska, Michal Jozwik, Christoph Schaeffel, Stephan Beer

Proceedings Volume 7389, 73891J (2009) https://doi.org/10.1117/12.828162

KEYWORDS: Semiconducting wafers, Interferometers, Inspection, Cameras, Imaging systems, Beam splitters, Glasses, Signal detection, Mirrors, Interferometry

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Proceedings Article | 11 August 2008 Paper

Twymann Green interferometry in study of AlN material as an actuation layer in MEMS

C. Gorecki, K. Krupa, A. Andrei, M. Jozwik, L. Nieradko, P. Delobelle, L. Hirsinger

Proceedings Volume 7064, 706402 (2008) https://doi.org/10.1117/12.796072

KEYWORDS: Aluminum nitride, Finite element methods, Interferometry, Microelectromechanical systems, Silicon, Electrodes, Thin films, Actuators, Scanning electron microscopy, Multilayers

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Proceedings Article | 25 April 2008 Paper

AlN driven microcantilever actuators: modeling, fabrication, characterization

K. Krupa, M. Józwik, A. Andrei, Ł. Nieradko, C. Gorecki, P. Delobelle, L. Hirsinger

Proceedings Volume 6995, 69950E (2008) https://doi.org/10.1117/12.781262

KEYWORDS: Aluminum nitride, Finite element methods, Interferometry, Silicon, Actuators, Microelectromechanical systems, Electrodes, Multilayers, Thin films, Silicon films

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Proceedings Article | 10 September 2007 Paper

Optical system for investigations of low-cost diffraction gratings

Przemyslaw Czapski, Lukasz Platos, Michal Jozwik

Proceedings Volume 6672, 667206 (2007) https://doi.org/10.1117/12.734325

KEYWORDS: Diffraction gratings, Diffraction, Wavefronts, Binary data, Sensors, Polymethylmethacrylate, Shearing interferometers, Optical design, Optical fabrication, Beam splitters

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Proceedings Article | 14 August 2006 Paper

Static and dynamic measurements of active MEMS by Twyman-Green interferometry: case of AlN-based microactuators

C. Gorecki, A. Andrei, M. Jozwik, K. Krupa, K. Dogheche, S. Balandras, L. Hirsinger, P. Delobelle

Proceedings Volume 6293, 629308 (2006) https://doi.org/10.1117/12.680691

KEYWORDS: Aluminum nitride, Microelectromechanical systems, Interferometry, Thin films, Transducers, Acoustics, Microactuators, Actuators, Ultrasonics, Silicon

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Proceedings Article | 9 May 2006 Paper

Reliability studies of micro-optical components in NEMO

F. Berghmans, M. Van Uffelen, S. Eve, E. Ernst, A. Last, D. Rabus, N. Huber, O. Kraft, A. Andrei, L. Nieradko, K. Krupa, M. Jozwik, C. Gorecki, L. Hirsinger, P. Delobelle, P. Kniazewski, L. Salbut, M. Kujawinska

Proceedings Volume 6193, 61930A (2006) https://doi.org/10.1117/12.662001

KEYWORDS: Refractive index, Reliability, Aluminum nitride, Metals, Optical fibers, Microelectromechanical systems, Tomography, Micro optics, Gold, Glasses

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Proceedings Article | 28 April 2006 Paper

LCOS as a reference element in Twyman-Green laser interferometer

Jacek Kacperski, Malgorzata Kujawinska, Michal Jozwik

Proceedings Volume 6188, 61881C (2006) https://doi.org/10.1117/12.663389

KEYWORDS: Liquid crystal on silicon, Interferometers, Wavefronts, Mirrors, Interferometry, Phase shifts, Spatial light modulators, Ferroelectric materials, Calibration, Silicon

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Proceedings Article | 28 April 2006 Paper

Fabrication, characterization, and reliability study of AlN-driven cantilevers

A. Andrei, K. Krupa, M. Jozwik, L. Nieradko, C. Gorecki, L. Hirsinger, P. Delobelle

Proceedings Volume 6188, 61880S (2006) https://doi.org/10.1117/12.663526

KEYWORDS: Aluminum nitride, Metals, Reliability, Interferometry, Etching, Reactive ion etching, Microelectromechanical systems, Aluminum, Electrodes, Silicon

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Proceedings Article | 21 April 2006 Paper

New generation of fully integrated optical microscopes on-chip: application to confocal microscope

Sylwester Bargiel, Lukasz Nieradko, Michal Józwik, Christophe Gorecki, Jan Dziuban

Proceedings Volume 6186, 618602 (2006) https://doi.org/10.1117/12.663770

KEYWORDS: Microlens, Silicon, Microscopes, Glasses, Confocal microscopy, Vertical cavity surface emitting lasers, 3D scanning, Etching, Actuators, Microopto electromechanical systems

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SPIE Journal Paper | 1 April 2006

Fabrication and optical packaging of an integrated Mach-Zehnder interferometer on top of a movable micromirror

Lukasz Nieradko, Christophe Gorecki, Michal Józwik, Andrei Sabac, Rolf Hoffmann, Andreas Bertz

JM3, Vol. 5, Issue 02, 023009, (April 2006) https://doi.org/10.1117/12.10.1117/1.2203366

KEYWORDS: Micromirrors, Waveguides, Silicon, Integrated optics, Semiconducting wafers, Mirrors, Photomasks, Sensors, Packaging, Etching

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Proceedings Article | 12 October 2005 Paper

Dynamic measurements of actuators driven by AlN layers

Jacek Kacperski, Malgorzata Kujawinska, Sergio Camacho Leon, Lukasz Nieradko, Michal Jozwik, Christophe Gorecki

Proceedings Volume 5958, 59580J (2005) https://doi.org/10.1117/12.622853

KEYWORDS: Liquid crystal on silicon, Interferometry, Finite element methods, Actuators, Aluminum nitride, Interferometers, Beam shaping, Phase shifts, Electrodes, Microelectromechanical systems

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SPIE Journal Paper | 1 October 2005

Multifunctional interferometric platform for on-chip testing the micromechanical properties of MEMS/MOEMS

Christophe Gorecki, Michal Józwik, Leszek Salbut

JM3, Vol. 4, Issue 04, 041402, (October 2005) https://doi.org/10.1117/12.10.1117/1.2110027

KEYWORDS: Interferometry, Actuators, Silicon, Plasma enhanced chemical vapor deposition, Ferroelectric materials, Refractive index, Microactuators, Microelectromechanical systems, Motion measurement, Interferometers

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Proceedings Article | 1 July 2005 Paper

Optical microlenses for MOEMS

Roberto Carasco, Jan Dziuban, Ignacio Moreno, Christophe Gorecki, Lukasz Nieradko, Rafal Walczak, Malgorzata Kopytko, Michal Jozwik

Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.607912

KEYWORDS: Etching, Glasses, Silicon, Microlens, Semiconducting wafers, Spherical lenses, Polishing, Photomasks, Anisotropic etching, Microopto electromechanical systems

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Proceedings Article | 13 June 2005 Paper

Development and investigation of high resolution resonant pressure sensor with optical interrogation

Michal Jozwik, Christophe Gorecki, Andrei Sabac, Dominique Heinis, Thierry Dean, Alain Jacobelli

Proceedings Volume 5856, (2005) https://doi.org/10.1117/12.612605

KEYWORDS: Sensors, Waveguides, Transducers, Ferroelectric materials, Refractive index, Optical resolution, Microelectromechanical systems, Actuators, Protactinium, Silicon

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Proceedings Article | 22 January 2005 Paper

Active membrane in situ read-out by monolithic integration of silicon-based Mach-Zehnder interferometer

Christophe Gorecki, Lukasz Nieradko, Andrei Sabac, Michal Jozwik, Alain Jackobelli, Thierry Dean, Rolf Hoffman, Andreas Bertz

Proceedings Volume 5719, (2005) https://doi.org/10.1117/12.592237

KEYWORDS: Waveguides, Mirrors, Sensors, Silicon, Refractive index, Microelectromechanical systems, Integrated optics, Micromirrors, Transducers, Mach-Zehnder interferometers

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Proceedings Article | 8 September 2004 Paper

Conventional and fiber optics interferometry for vibration mode analysis

Krzysztof Patorski, Artur Olszak, Leszek Salbut, Agata Jozwicka, Jacek Kacperski, Michal Jozwik, Anna Sliwa

Proceedings Volume 5576, (2004) https://doi.org/10.1117/12.581775

KEYWORDS: Interferometry, Fiber optics, Phase shift keying, Semiconductor lasers, Modulation, Ferroelectric materials, Bessel functions, Speckle pattern, Heterodyning, Interferometers

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Proceedings Article | 17 August 2004 Paper

Interferometric methods for static and dynamic characterizations of micromembranes for sensing functions

Leszek Salbut, Jacek Kacperski, Adam Styk, Michal Jozwik, Christophe Gorecki, Hakan Urey, Alain Jacobelli, Thierry Dean

Proceedings Volume 5458, (2004) https://doi.org/10.1117/12.545574

KEYWORDS: Interferometry, Semiconducting wafers, Manufacturing, Silicon, Electrodes, Phase interferometry, Shape analysis, Ferroelectric materials, Bessel functions, Statistical analysis

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Proceedings Article | 17 August 2004 Paper

Design, testing, and calibration of an integrated Mach-Zehnder-based optical read-out architecture for MEMS characterization

Andrei Sabac, Christophe Gorecki, Michal Jozwik, Thierry Dean, Alain Jacobelli

Proceedings Volume 5458, (2004) https://doi.org/10.1117/12.546299

KEYWORDS: Waveguides, Geometrical optics, Microelectromechanical systems, Integrated optics, Ferroelectric materials, Silicon, Phase shifts, Calibration, Light wave propagation, Radio propagation

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Proceedings Article | 2 August 2004 Paper

Evaluation of the mechanical properties of square membranes prestressed by PECVD silicon oxynitride thin films

Michal Jozwik, Christophe Gorecki, Patrick Delobelle, Andrei Sabac, Malgorzata Kujawinska

Proceedings Volume 5532, (2004) https://doi.org/10.1117/12.569806

KEYWORDS: Silicon, Refractive index, Plasma enhanced chemical vapor deposition, Thin films, Silicon films, Interferometry, Semiconducting wafers, Oxides, Finite element methods, Thin film deposition

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Proceedings Article | 23 December 2003 Paper

Multifunctional interferometric platform for on-chip testing of the micromechanical properties of MEMS/MOEMS

Christophe Gorecki, Michal Jozwik, Leszek Salbut

Proceedings Volume 5343, (2003) https://doi.org/10.1117/12.524324

KEYWORDS: Interferometry, Actuators, Ferroelectric materials, Refractive index, Silicon, Plasma enhanced chemical vapor deposition, Microactuators, Microelectromechanical systems, Electrodes, Motion measurement

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Proceedings Article | 3 October 2003 Paper

Active microelement testing by interferometry using time-average and quasi-stroboscopic techniques

Leszek Salbut, Krzysztof Patorski, Michal Jozwik, Jacek Kacperski, Christophe Gorecki, Alain Jacobelli, Thierry Dean

Proceedings Volume 5145, (2003) https://doi.org/10.1117/12.500747

KEYWORDS: Interferometry, Bessel functions, Visualization, Ferroelectric materials, Modulation, Electrodes, Calibration, Digital holography, Spatial resolution, Optical testing

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Proceedings Article | 3 October 2003 Paper

Interferometry system for out-of-plane microdisplacement measurement: application to mechanical expertise of scratch drive actuators

Michal Jozwik, Christophe Gorecki, Patrice Le Moal, Eric Joseph, Patrice Minotti

Proceedings Volume 5145, (2003) https://doi.org/10.1117/12.502247

KEYWORDS: Actuators, Interferometry, Silicon, Microscopes, Numerical simulations, Interferometers, Microelectromechanical systems, Objectives, Wavefronts, Phase shifts

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Proceedings Article | 22 September 2003 Paper

Interferometry system for out-of-plane displacements and microshape measurements of silicon membranes

Michal Jozwik, Andrei Sabac, Christophe Gorecki

Proceedings Volume 5124, (2003) https://doi.org/10.1117/12.517118

KEYWORDS: Silicon, Thin films, Refractive index, Plasma enhanced chemical vapor deposition, Interferometry, Silicon films, Thin film deposition, Integrated optics, Interferometers, Etching

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Proceedings Article | 3 April 2003 Paper

Silicon oxynitride waveguides developed for optomechanical sensing functions

Andrei Sabac, Michal Jozwik, Lukasz Nieradko, Christophe Gorecki

Proceedings Volume 4944, (2003) https://doi.org/10.1117/12.468293

KEYWORDS: Waveguides, Silicon, Refractive index, Plasma enhanced chemical vapor deposition, Integrated optics, Microelectromechanical systems, Thin films, Modulation, Micromachining, Silica

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Proceedings Article | 25 March 2003 Paper

Interferometry system for the mechanical characterization of membranes with silicon oxynitride thin films fabricated by PECVD

Michal Jozwik, Patrick Delobelle, Andrei Sabac, Christophe Gorecki

Proceedings Volume 4945, (2003) https://doi.org/10.1117/12.468412

KEYWORDS: Thin films, Plasma enhanced chemical vapor deposition, Refractive index, Silicon, Interferometry, Silicon films, Plasma, Thin film deposition, Interferometers, Waveguides

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Proceedings Article | 19 June 2002 Paper

Application of digital holographic microinterferometer for microelements testing

Leszek Salbut, Agata Jozwicka, Pawel Dymerski, Michal Jozwik

Proceedings Volume 4778, (2002) https://doi.org/10.1117/12.473569

KEYWORDS: Digital holography, Holograms, Holographic interferometry, Interferometry, Holography, Optical spheres, Scattering, Reconstruction algorithms, Silicon, Charge-coupled devices

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Proceedings Article | 19 April 2002 Paper

Optical interferometry investigation of internal stress and optomechanical characteristics of silicon-oxynitride thin films fabricated by PECVD

Michal Jozwik, Andrei Sabac, Christophe Gorecki

Proceedings Volume 4755, (2002) https://doi.org/10.1117/12.462881

KEYWORDS: Thin films, Plasma enhanced chemical vapor deposition, Silicon, Refractive index, Silicon films, Interferometry, Interferometers, Thin film deposition, Plasma, Optical interferometry

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Proceedings Article | 30 October 2001 Paper

Characterization of internal stress of silicon oxinitride thin films fabricated by plasma-enhanced chemical vapor deposition: applications in integrated optics

Christophe Gorecki, Andrei Sabac, Michal Jozwik, Seung Lee

Proceedings Volume 4596, (2001) https://doi.org/10.1117/12.447343

KEYWORDS: Thin films, Plasma enhanced chemical vapor deposition, Silicon, Refractive index, Silicon films, Waveguides, Hydrogen, Integrated optics, Plasma, Microopto electromechanical systems

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Proceedings Article | 23 October 2001 Paper

Waveguide microinterferometry system for microelements investigation

Leszek Salbut, Michal Jozwik, Christophe Gorecki, Seung Lee

Proceedings Volume 4400, (2001) https://doi.org/10.1117/12.445596

KEYWORDS: Waveguides, Diffraction gratings, Silicon, Refractive index, Interferometry, Interferometers, Thin films, Head, Beam splitters, Sensors

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Proceedings Article | 1 September 2000 Paper

Novel aspects of interferometric testing of silicon microelement properties

Leszek Salbut, Michal Jozwik

Proceedings Volume 4075, (2000) https://doi.org/10.1117/12.397922

KEYWORDS: Interferometers, Digital holography, Waveguides, Silicon, Diffraction gratings, Interferometry, Semiconductor lasers, Holography, Holograms, Holographic interferometry

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