Dr. Michael Kühnel Profile

Dr. Michael Kühnel

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Publications (5)

Proceedings Article | 23 March 2020 Paper

Tip- and laser-based nanofabrication up to 100 mm with sub-nanometre precision

Ingo Ortlepp, Michael Kühnel, Martin Hofmann, Laura Weidenfeller, Johannes Kirchner, Shraddha Supreeti, Rostyslav Mastylo, Mathias Holz, Thomas Michels, Roland Füßl, Ivo Rangelow, Thomas Fröhlich, Denis Dontsov, Christoph Schäffel, Eberhard Manske

Proceedings Volume 11324, 113240A (2020) https://doi.org/10.1117/12.2551044

KEYWORDS: Interferometers, Nanofabrication, Mirrors, Actuators, Near field optics, Control systems, Manufacturing, Nanotechnology, Physics, Atomic force microscopy

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Proceedings Article | 2 October 2019 Paper

Diffraction compensation of slope errors on strongly curved grating substrates

Christoph Braig, Jürgen Probst, Enrico Langlotz, Ilko Rahneberg, Michael Kühnel, Alexei Erko, Thomas Krist, Christian Seifert

Proceedings Volume 11109, 111090U (2019) https://doi.org/10.1117/12.2550336

KEYWORDS: Spherical lenses, Mirrors, Diffraction gratings, Spectrometers, Spectral resolution, Diffraction, X-rays, Diffraction, Ray tracing, X-rays, Optical design, Ray tracing, Error analysis, Optical design, Error analysis

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Proceedings Article | 4 March 2019 Paper

Laser-microfabrication with accurate positioning and metrological traceability

Laura Weidenfeller, Johannes Kirchner, Martin Hofmann, Michael Kühnel, Carsten Reinhardt, Ivo Rangelow, Eberhard Manske

Proceedings Volume 10930, 109300L (2019) https://doi.org/10.1117/12.2508248

KEYWORDS: Sensors, Multiphoton lithography, Metrology, Two photon polymerization

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Proceedings Article | 4 March 2019 Paper

A combined laser scanning and DLW tool for measuring and fabrication tasks with NPMM

Johannes Kirchner, Laura Weidenfeller, Uwe Gerhardt, Rostyslav Mastylo, Michael Kühnel, Stefan Sinzinger, Eberhard Manske

Proceedings Volume 10930, 1093017 (2019) https://doi.org/10.1117/12.2508263

KEYWORDS: Sensors, Confocal microscopy, Laser scanners, Laser processing, Fiber coupled lasers

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Proceedings Article | 19 March 2018 Presentation + Paper

Field-emission scanning probe lithography with self-actuating and self-sensing cantilevers for devices with single digit nanometer dimensions

Ivo Rangelow, Claudia Lenk , Martin Hofmann , Steve Lenk , Tzvetan Ivanov , Ahmad Ahmad , Marcus Kaestner, Elshad Guliyev, Christoph Reuter, Matthias Budden, Jens-Peter Zöllner, Mathias Holz , Alexander Reum, Zahid Durrani, Mervyn Jones, Cemal Aydogan, Mahmut Bicer, B. Erdem Alaca, Michael Kuehnel, Thomas Fröhlich, Roland Fuessl, E. Manske

Proceedings Volume 10584, 1058406 (2018) https://doi.org/10.1117/12.2299955

KEYWORDS: Silicon, Lithography, Etching, Scanning probe lithography, Cryogenics, Optical alignment, Nanoelectronics, Reactive ion etching, Nanolithography, Electron beam lithography

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