Dr. Michael Kühnel
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11324, Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020
KEYWORDS: Actuators, Nanotechnology, Mirrors, Interferometers, Manufacturing, Physics, Control systems, Atomic force microscopy, Nanofabrication, Near field optics

Proceedings Article | 2 October 2019 Paper
Proc. SPIE. 11109, Advances in Metrology for X-Ray and EUV Optics VIII
KEYWORDS: Diffraction, Diffraction, Mirrors, Optical design, Optical design, Error analysis, Error analysis, X-rays, X-rays, Spectrometers, Ray tracing, Ray tracing, Spectral resolution, Spherical lenses, Diffraction gratings

Proceedings Article | 4 March 2019 Paper
Proc. SPIE. 10930, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XII
KEYWORDS: Confocal microscopy, Sensors, Laser processing, Laser scanners, Fiber coupled lasers

Proceedings Article | 4 March 2019 Paper
Proc. SPIE. 10930, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XII
KEYWORDS: Metrology, Two photon polymerization, Sensors, Multiphoton lithography

Proceedings Article | 19 March 2018 Presentation + Paper
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Lithography, Electron beam lithography, Etching, Silicon, Scanning probe lithography, Optical alignment, Reactive ion etching, Nanoelectronics, Cryogenics, Nanolithography

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