Michael B. Cohn
President at MicroAssembly Technologies Inc
SPIE Involvement:
Author
Publications (10)

Proceedings Article | 28 June 2006 Paper
Proc. SPIE. 6272, Advances in Adaptive Optics II
KEYWORDS: Actuators, Lithography, Mirrors, Metals, Nickel, Silicon, Deformable mirrors, Epoxies, Semiconducting wafers, Adhesives

Proceedings Article | 23 January 2006 Paper
Proc. SPIE. 6113, MEMS/MOEMS Components and Their Applications III
KEYWORDS: Microelectromechanical systems, Actuators, Gold, Mirrors, Sputter deposition, Electrodes, Metals, Silicon, Deformable mirrors, Prototyping

Proceedings Article | 23 January 2006 Paper
Proc. SPIE. 6113, MEMS/MOEMS Components and Their Applications III
KEYWORDS: Microelectromechanical systems, Actuators, Reflectors, Mirrors, Adaptive optics, Deformable mirrors, Spatial light modulators, Micromirrors, Semiconducting wafers, Assembly equipment

Proceedings Article | 10 September 1998 Paper
Proc. SPIE. 3515, Microfluidic Devices and Systems
KEYWORDS: Microelectromechanical systems, Actuators, Microfluidics, Particles, Silicon, Directed self assembly, Semiconducting wafers, Adhesives, Stochastic processes, Wafer bonding

Proceedings Article | 8 September 1998 Paper
Proc. SPIE. 3514, Micromachined Devices and Components IV
KEYWORDS: Microelectromechanical systems, Actuators, Microfluidics, Particles, Silicon, Directed self assembly, Semiconducting wafers, Adhesives, Stochastic processes, Wafer bonding

Showing 5 of 10 publications
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