Dr. Michael Kraft
Professor at Univ Duisburg-Essen
SPIE Involvement:
Publications (4)

Proceedings Article | 21 May 2015 Paper
Proc. SPIE. 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
KEYWORDS: Microelectromechanical systems, Oxides, CMOS sensors, Data modeling, Sensors, Silicon, Capacitance, Low pressure chemical vapor deposition, Plasma enhanced chemical vapor deposition, Semiconducting wafers

Proceedings Article | 26 May 2011 Paper
Proc. SPIE. 8079, Laser Acceleration of Electrons, Protons, and Ions; and Medical Applications of Laser-Generated Secondary Sources of Radiation and Particles
KEYWORDS: Carbon, Cancer, Particles, Electrons, Ions, Laser applications, Laser development, Ion beams, Ion lasers, Fusion energy

Proceedings Article | 2 October 2001 Paper
Proc. SPIE. 4558, Reliability, Testing, and Characterization of MEMS/MOEMS
KEYWORDS: Microelectromechanical systems, Capacitors, Electrodes, Nickel, Control systems, Modulators, Capacitance, Simulink, Chemical elements, Systems modeling

Proceedings Article | 18 August 2000 Paper
Proc. SPIE. 4177, Microfluidic Devices and Systems III
KEYWORDS: Actuators, Ferroelectric materials, Microfluidics, Particles, Silicon, Gases, Liquids

Conference Committee Involvement (2)
Bio-MEMS and Medical Microdevices III
9 May 2017 | Barcelona, Spain
Bio-MEMS and Medical Microdevices II
5 May 2015 | Barcelona, Spain
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