Michael Mesawich
Vice President of Marketing at Pall Corp
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Author
Publications (6)

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Lithography, Particles, Ions, Silicon, Scanning electron microscopy, Aluminum, Plasma etching, Semiconducting wafers

Proceedings Article | 27 March 2017 Paper
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Semiconductors, Lithography, Contamination, Defect detection, Metals, Particles, Photoresist materials, Semiconducting wafers, Wafer testing, Contamination control

Proceedings Article | 1 April 2009 Paper
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Semiconductors, Lithography, Microfluidics, Optical lithography, Particles, Manufacturing, Photoresist materials, Bridges, Ozone, Back end of line

Proceedings Article | 14 May 2004 Paper
Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI
KEYWORDS: Lithography, Logic, Etching, Polymers, Metals, Chemistry, Photoresist materials, Semiconducting wafers, 193nm lithography, Industrial chemicals

Proceedings Article | 12 June 2003 Paper
Proc. SPIE. 5039, Advances in Resist Technology and Processing XX
KEYWORDS: Diffractive optical elements, Sensors, Digital filtering, Particles, Coating, Chemistry, Manufacturing, Thin film coatings, Semiconducting wafers, Bottom antireflective coatings

Showing 5 of 6 publications
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