Michael Müller
at Technische Univ Chemnitz
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 27 March 2015 Paper
Proc. SPIE. 9435, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2015
KEYWORDS: Polishing, Ferroelectric materials, Sensors, Metals, Ceramics, Composites, Aluminum, Adhesives, Surface finishing, Chemical mechanical planarization

Proceedings Article | 19 April 2013 Paper
Proc. SPIE. 8692, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2013
KEYWORDS: Sensors, Electrodes, Metals, Composites, Manufacturing, Transducers, Aluminum, Semiconducting wafers, Tolerancing, Assembly tolerances

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