Dr. Michael S. Salib
at Intel Corp
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 25 October 2005 Paper
Proc. SPIE. 6017, Nanophotonics for Communication: Materials and Devices II
KEYWORDS: Lithography, Electron beam lithography, Waveguides, Etching, Silicon, Photonic crystals, Optical fabrication, Optical proximity correction, 193nm lithography, Oxidation

Proceedings Article | 31 January 2005 Paper
Proc. SPIE. 5624, Semiconductor and Organic Optoelectronic Materials and Devices
KEYWORDS: Packaging, Optical components, Waveguides, Etching, Silicon, Manufacturing, Integrated optics, Silicon photonics, Semiconducting wafers, Optics manufacturing

Proceedings Article | 18 August 2004 Paper
Proc. SPIE. 5451, Integrated Optics and Photonic Integrated Circuits
KEYWORDS: Oxides, Capacitors, Waveguides, Polarization, Silicon, Doping, Modulators, Optical modulators, Molybdenum, Phase shifts

Proceedings Article | 9 February 1996 Paper
Proc. SPIE. 2716, Smart Structures and Materials 1996: Smart Materials Technologies and Biomimetics
KEYWORDS: Actuators, Optical fibers, Mirrors, Switching, Lamps, Magnetism, Adaptive optics, Electro optics, Bromine, Michelson interferometers

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