Dr. Michael Schneider
at TU Wien
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 14 June 2017 Presentation + Paper
Proc. SPIE. 10246, Smart Sensors, Actuators, and MEMS VIII
KEYWORDS: Microelectromechanical systems, Thin films, FT-IR spectroscopy, Argon, Annealing, Silicon, Hydrogen, Silicon films, Plasma enhanced chemical vapor deposition, Chemical analysis, Silicon carbide, Thin film deposition, Plasma

Proceedings Article | 21 May 2015 Paper
Proc. SPIE. 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
KEYWORDS: Thin films, Annealing, Silicon, Diffusion, Nitrogen, Atomic force microscopy, Oxygen, Silicon films, Aluminum nitride, Temperature metrology

Proceedings Article | 17 May 2013 Paper
Proc. SPIE. 8763, Smart Sensors, Actuators, and MEMS VI
KEYWORDS: Thin films, Electrodes, Dielectrics, Silicon, Reliability, Silicon films, Aluminum nitride, Semiconducting wafers, Dielectric breakdown, Temperature metrology

Proceedings Article | 5 May 2011 Paper
Proc. SPIE. 8066, Smart Sensors, Actuators, and MEMS V
KEYWORDS: Microelectromechanical systems, Actuators, Thin films, Data modeling, Electrodes, Silicon, Silicon films, Aluminum nitride, Thin film devices, Instrument modeling

Proceedings Article | 5 May 2011 Paper
Proc. SPIE. 8066, Smart Sensors, Actuators, and MEMS V
KEYWORDS: Actuators, Oxides, Thin films, Sensors, Silicon, Aluminum, Aluminum nitride, Plasma enhanced chemical vapor deposition, Semiconducting wafers, Carbon nanotubes

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