Prof. Michael Totzeck
Fellow at Carl Zeiss AG
SPIE Involvement:
Conference Program Committee | Author
Publications (21)

Proceedings Article | 9 September 2010 Paper
Proc. SPIE. 7652, International Optical Design Conference 2010
KEYWORDS: Optical imaging, Optical components, Apodization, Polarization, Imaging systems, Wavefronts, Polarizers, Wave plates, Zernike polynomials, Chemical elements

SPIE Journal Paper | 1 July 2009
JM3 Vol. 8 Issue 03
KEYWORDS: Zernike polynomials, Polarization, Wavefronts, Apodization, Wave plates, Resolution enhancement technologies, Polarizers, Lithography, Critical dimension metrology, Imaging systems

Proceedings Article | 4 December 2008 Paper
Proc. SPIE. 7140, Lithography Asia 2008
KEYWORDS: Lithography, Diffraction, Apodization, Polarization, Imaging systems, Wavefronts, Zernike polynomials, Process control, Lithographic lenses, Critical dimension metrology

Proceedings Article | 11 April 2008 Paper
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Thin films, Lithography, Diffraction, Apodization, Fourier transforms, Computer simulations, Wave propagation, Solids, Photomasks, Semiconducting wafers

Proceedings Article | 27 March 2007 Paper
Proc. SPIE. 6520, Optical Microlithography XX
KEYWORDS: Thin films, Lithography, Diffraction, Optical lithography, Polarization, Birefringence, Pellicles, Photomasks, Optical proximity correction, Critical dimension metrology

Showing 5 of 21 publications
Conference Committee Involvement (14)
Computational Optics 2021
13 September 2021 | Madrid, Spain
3D Printed Optics and Additive Photonic Manufacturing II
7 April 2020 | Online Only, France
Computational Optics 2018
16 May 2018 | Frankfurt, Germany
3D Printed Optics and Additive Photonic Manufacturing
23 April 2018 | Strasbourg, France
Modeling Aspects in Optical Metrology
26 June 2017 | Munich, Germany
Showing 5 of 14 Conference Committees
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