Dr. Michael Wagner Profile

Dr. Michael Wagner

at Fraunhofer-Institut für Photonische Mikrosysteme

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Author

Publications (18)

Proceedings Article | 28 February 2020 Paper

Novel CMOS-integrated 512x320 tip-tilt micro mirror array and related technology platform

A. Gehner, S. Döring, D. Rudloff, D. Kunze, P. Dürr, S. Francés, L. Hänsel, H. Torlee, A. Elgner, M. Eckert, M. Friedrichs, J. Heber, J. Schmidt, W. Pufe, C. Hohle, M. Schulze, M. Wagner

Proc. SPIE. 11293, MOEMS and Miniaturized Systems XIX

KEYWORDS: Actuators, Mirrors, Optical lithography, Calibration, Micromirrors, CMOS technology, Analog electronics

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Proceedings Article | 20 March 2018

Advances in MOEMS technologies for high quality imaging systems

Harald Schenk, Michael Wagner, Jan Grahmann, André Merten

Proc. SPIE. 10587, Optical Microlithography XXXI

KEYWORDS: Mirrors, Beam steering, Imaging systems, Scanners, Coating, Laser marking, Microopto electromechanical systems, Micromirrors, Analog electronics, Phased array optics

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Proceedings Article | 10 March 2015 Paper

Spatio-angular light control in microscopes using micro mirror arrays

F. Rückerl, S. Bellow, D. Berndt, J-Y. Tinevez, Jörg Heber, M. Wagner, S. Shorte

Proc. SPIE. 9305, Optical Techniques in Neurosurgery, Neurophotonics, and Optogenetics II

KEYWORDS: Microscopes, Mirrors, Microscopy, Ions, Control systems, Spatial light modulators, Objectives, Micromirrors, Optogenetics, Neodymium

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Proceedings Article | 27 February 2015 Paper

Spatially resolved contrast measurement of diffractive micromirror arrays

Cornelius Sicker, Jörg Heber, Dirk Berndt, Florian Rückerl, Jean-Yves Tinevez, Spencer Shorte, Michael Wagner, Harald Schenk

Proc. SPIE. 9375, MOEMS and Miniaturized Systems XIV

KEYWORDS: Diffraction, Mirrors, Cameras, Sensors, Light scattering, Interferometry, CCD cameras, Micromirrors, Stray light, Scatter measurement

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Proceedings Article | 7 March 2014 Paper

High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications

Jan-Uwe Schmidt, Ulrike Dauderstaedt, Peter Duerr, Martin Friedrichs, Thomas Hughes, Thomas Ludewig, Dirk Rudloff, Tino Schwaten, Daniela Trenkler, Michael Wagner, Ingo Wullinger, Andreas Bergstrom, Peter Bjoernangen, Fredrik Jonsson, Tord Karlin, Peter Ronnholm, Torbjorn Sandstrom

Proc. SPIE. 8977, MOEMS and Miniaturized Systems XIII

KEYWORDS: Mirrors, Modulation, Silica, Imaging systems, Electrodes, Copper, Laser processing, Laser applications, Semiconductor lasers, Spatial light modulators

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Proceedings Article | 16 February 2012 Paper

One-dimensional light modulator

S. Sinning, I. Wullinger, J.-U. Schmidt, M. Friedrichs, U. Dauderstädt, S. Wolschke, T. Hughes, D. Pahner, M. Wagner

Proc. SPIE. 8252, MOEMS and Miniaturized Systems XI

KEYWORDS: Mirrors, Continuous wave operation, Electrodes, Laser applications, Reflectivity, Modulators, Microopto electromechanical systems, Micromirrors, Surface properties, Printed circuit board testing

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Proceedings Article | 14 February 2011 Paper

In situ surface topography measurement of MOEMS structures under laser exposure

Alexander Mai, Mathias Krellmann, Steffen Sinning, Steffen Wolschke, Ulrike Dauderstädt, Harald Schenk, Dieter Schmeißer, Michael Wagner

Proc. SPIE. 7930, MOEMS and Miniaturized Systems X

KEYWORDS: Mirrors, Interferometers, In situ metrology, Error analysis, Interferometry, Spatial light modulators, Objectives, Microopto electromechanical systems, Micromirrors, Phase shifts

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Proceedings Article | 14 May 2010 Paper

Multispectral characterization of diffractive micromirror arrays

Dirk Berndt, Jörg Heber, Steffen Sinning, Detlef Kunze, Jens Knobbe, Jan-Uwe Schmidt, Martin Bring, Dirk Rudloff, Martin Friedrichs, Jana Rössler, Mark Eckert, Wolfram Kluge, Hannes Neumann, Michael Wagner, Hubert Lakner

Proc. SPIE. 7718, Optical Micro- and Nanometrology III

KEYWORDS: Laser sources, Diffraction, Mirrors, Homogenization, Deep ultraviolet, Imaging systems, Cameras, Reflectivity, Micromirrors, Spherical lenses

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Proceedings Article | 14 May 2010 Paper

Technology development of diffractive micromirror arrays for the deep ultraviolet to the near infrared spectral range

J.-U. Schmidt, M. Bring, J. Heber, M. Friedrichs, D. Rudloff, J. Rößler, D. Berndt, H. Neumann, W. Kluge, M. Eckert, M. List, M. Müller, M. Wagner

Proc. SPIE. 7716, Micro-Optics 2010

KEYWORDS: Actuators, Near infrared, Electron beam lithography, Mirrors, Electronics, Deep ultraviolet, Metals, Reflectivity, Control systems, Micromirrors

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Proceedings Article | 5 February 2010 Paper

Temperature measurement on MOEMS micromirror plates under illumination

Ingo Wullinger, Dirk Rudloff, Klaus Lukat, Peter Dürr, Mathias Krellmann, Detlef Kunze, Aravind Narayana Samy, Ulrike Dauderstädt, Michael Wagner

Proc. SPIE. 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX

KEYWORDS: Mirrors, Microsystems, Calibration, Resistance, Microopto electromechanical systems, Micromirrors, Convection, Resistors, Temperature metrology, Photonic microstructures

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Proceedings Article | 19 February 2009 Paper

Advances in SLM development for microlithography

Ulrike Dauderstädt, Per Askebjer, Peter Björnängen, Peter Dürr, Martin Friedrichs, Matthias List, Dirk Rudloff, Jan-Uwe Schmidt, Michael Müller, Michael Wagner

Proc. SPIE. 7208, MOEMS and Miniaturized Systems VIII

KEYWORDS: Actuators, Mirrors, Optical lithography, Deep ultraviolet, Electrodes, Dielectrics, Spatial light modulators, Micromirrors, Aluminum, Laser systems engineering

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SPIE Journal Paper | 1 April 2008

Charging effects in micromirror spatial light modulators

Ulrike Dauderstädt, Peter Duerr, Steffen Sinning, Ingo Wullinger, Michael Wagner

JM3 Vol. 7 Issue 02

KEYWORDS: Mirrors, Electrodes, Spatial light modulators, Micromirrors, Deep ultraviolet, Oxides, Actuators, Analog electronics, Titanium, Silicon

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Proceedings Article | 30 October 2007 Paper

Contrast properties of spatial light modulators for microlithography

J. Heber, D. Kunze, P. Dürr, D. Rudloff, M. Wagner, P. Björnängen, J. Luberek, U. Berzinsh, T. Sandström, T. Karlin

Proc. SPIE. 6730, Photomask Technology 2007

KEYWORDS: Microelectromechanical systems, Diffraction, Mirrors, Optical lithography, Deep ultraviolet, Reflectivity, Surface roughness, Microopto electromechanical systems, Micromirrors, Photomasks

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Proceedings Article | 14 February 2007 Paper

AO SLM demonstration system and test bed

Michael Wildenhain, Jens Knobbe, Andreas Gehner, Michael Wagner, Hubert Lakner

Proc. SPIE. 6467, MEMS Adaptive Optics

KEYWORDS: Microelectromechanical systems, Monochromatic aberrations, Mirrors, Imaging systems, Spatial frequencies, Wavefronts, Adaptive optics, Spatial light modulators, Micromirrors, Modulation transfer functions

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Proceedings Article | 19 January 2007 Paper

Charging effects in spatial light modulators based on micromirrors

Ulrike Dauderstädt, Thor Bakke, Peter Dürr, Steffen Sinning, Ingo Wullinger, Michael Wagner, Hubert Lakner

Proc. SPIE. 6463, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI

KEYWORDS: Actuators, Oxides, Mirrors, Titanium, Deep ultraviolet, Electrodes, Silicon, Spatial light modulators, Micromirrors, Aluminum

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Proceedings Article | 23 January 2006 Paper

Global flatness of spatial light modulators

Michael Wagner, Ulrich Künzelmann, Harald Schenk, Hubert Lakner

Proc. SPIE. 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV

KEYWORDS: Packaging, Mirrors, Optical spheres, Microsystems, Spatial light modulators, Micromirrors, Photomasks, Micro cutting, Semiconducting wafers, Adhesives

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Proceedings Article | 23 January 2006 Paper

Micro-actuator with extended analog deflection at low drive voltage

Peter Dürr, Andreas Gehner, Jan Schmidt, Detlef Kunze, Michael Wagner, Hubert Lakner

Proc. SPIE. 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV

KEYWORDS: Actuators, Mirrors, Electronics, Safety, Capacitors, Electrodes, Finite element methods, Chemical elements, Analog electronics, Electromagnetism

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Proceedings Article | 6 January 2006 Paper

Bending of aluminum alloy beams depending on irradiance and repetition rate of UV laser radiation

Mathias Krellmann, Martin Friedrichs, Ulrike Dauderstädt, Michael Wagner, Hubert Lakner

Proc. SPIE. 6111, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V

KEYWORDS: Semiconductors, Lithography, Interferometers, Ultraviolet radiation, Materials processing, Laser ablation, Microopto electromechanical systems, Aluminum, Excimer lasers, Mirror structures

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Showing 5 of 18 publications

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