Dr. Michel Despont
at CSEM SA
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 4 March 2019 Paper
Proc. SPIE. 10931, MOEMS and Miniaturized Systems XVIII
KEYWORDS: Mirrors, Spectrographs, Electrodes, Spectroscopy, Clouds, Microopto electromechanical systems, Micromirrors, Semiconducting wafers, Wafer bonding

Proceedings Article | 22 February 2018 Presentation + Paper
Proc. SPIE. 10545, MOEMS and Miniaturized Systems XVII
KEYWORDS: Gold, Optical filters, Mirrors, Fabry–Perot interferometers, Metals, Silicon, Infrared radiation, Microfabrication, Semiconducting wafers

Proceedings Article | 27 February 2015 Paper
Proc. SPIE. 9375, MOEMS and Miniaturized Systems XIV
KEYWORDS: Microelectromechanical systems, Mirrors, Sensors, Scanners, Silicon, Resistance, Micromirrors, Position sensors, Piezoresistive sensors, Wheatstone bridges

Proceedings Article | 1 October 2013 Paper
Proc. SPIE. 8886, 29th European Mask and Lithography Conference
KEYWORDS: Lithography, Electron beam lithography, Optical lithography, Polymers, Silicon, Scanning probe lithography, Scanning electron microscopy, Photomasks, Reactive ion etching, Nanolithography

Proceedings Article | 3 April 2010 Paper
Proc. SPIE. 7637, Alternative Lithographic Technologies II
KEYWORDS: Lithography, Nanostructures, Electron beam lithography, Optical lithography, Sensors, Etching, Glasses, Molecules, Silicon, Reactive ion etching

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