Michele Belotti
at Univ degli Studi di Pavia
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 9 February 2005 Paper
Proc. SPIE. 5635, Nanophotonics, Nanostructure, and Nanometrology
KEYWORDS: Dispersion, Reflectivity, Photonic crystals, Waveguides, Silicon, Polarization, Dielectric polarization, Attenuated total reflectance, Photon polarization, Dielectrics

Proceedings Article | 27 January 2005 Paper
Proc. SPIE. 5645, Advanced Microlithography Technologies
KEYWORDS: Polymethylmethacrylate, Nanoimprint lithography, Ultraviolet radiation, Semiconducting wafers, Reactive ion etching, Etching, Liquids, Polymers, Silicon, Plasma

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