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Mike Whelan
President at Verity Instruments Inc
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Author
Publications (2)
Proceedings Article | 10 May 2005 Paper
Novel two channel self-registering integrated macro inspection tool
Arun Aiyer, Mark Meloni, Andrew Kueny, Mike Whelan
Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.599873
KEYWORDS: Inspection, Semiconducting wafers, Reflectivity, Manufacturing, Wafer-level optics, Head, Polarization, Beam propagation method, Wafer inspection, Image processing
Proceedings Article | 19 September 1995 Paper
Multiresolution pattern detector networks for controlling plasma etch reactors
Ronald Allen, Randy Moore, Mike Whelan
Proceedings Volume 2637, (1995) https://doi.org/10.1117/12.221321
KEYWORDS: Etching, Semiconducting wafers, Plasma etching, Plasma, Data modeling, Sensors, Signal processing, Statistical modeling, Monochromators, Interference (communication)
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