Dr. Mikhail Haurylau
Systems Engineer at Onto Innovation Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 9 February 2007 Paper
Proc. SPIE. 6477, Silicon Photonics II
KEYWORDS: Oxides, Polymethylmethacrylate, Etching, Silicon, Photonic crystals, Liquid crystals, Plasma etching, Electro optics, Optical microcavities, Plasma

Proceedings Article | 13 September 2005 Paper
Proc. SPIE. 5926, Tuning the Optical Response of Photonic Bandgap Structures II
KEYWORDS: Switching, Birefringence, Etching, Electrodes, Silicon, Liquid crystals, Aluminum, Silicon photonics, Optical interconnects, Semiconducting wafers

Proceedings Article | 14 October 2004 Paper
Proc. SPIE. 5511, Tuning the Optical Response of Photonic Bandgap Structures
KEYWORDS: Refractive index, Mirrors, Etching, Silicon, Liquid crystals, Picosecond phenomena, Geometrical optics, Optical interconnects, Semiconducting wafers, Optical microcavities

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