Dr. Mikhail Haurylau Profile

Dr. Mikhail Haurylau

Systems Engineer at Onto Innovation Inc

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Publications (3)

Proceedings Article | 9 February 2007 Paper

Hybrid photonic crystal microcavity switches on SOI

Sean Anderson, Mikhail Haurylau, Jidong Zhang, Philippe Fauchet

Proc. SPIE. 6477, Silicon Photonics II

KEYWORDS: Oxides, Polymethylmethacrylate, Etching, Silicon, Photonic crystals, Liquid crystals, Plasma etching, Electro optics, Optical microcavities, Plasma

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Proceedings Article | 13 September 2005 Paper

Electrical tuning of the silicon-based 2-D photonic bandgap structures

Mikhail Haurylau, Sean Anderson, Kenneth Marshall, Philippe Fauchet

Proc. SPIE. 5926, Tuning the Optical Response of Photonic Bandgap Structures II

KEYWORDS: Switching, Birefringence, Etching, Electrodes, Silicon, Liquid crystals, Aluminum, Silicon photonics, Optical interconnects, Semiconducting wafers

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Proceedings Article | 14 October 2004 Paper

Dynamically tunable 1D and 2D photonic bandgap structures for optical interconnect applications

Mikhail Haurylau, Sharon Weiss, Philippe Fauchet

Proc. SPIE. 5511, Tuning the Optical Response of Photonic Bandgap Structures

KEYWORDS: Refractive index, Mirrors, Etching, Silicon, Liquid crystals, Picosecond phenomena, Geometrical optics, Optical interconnects, Semiconducting wafers, Optical microcavities

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